About us

ZEISS Semiconductor Manufacturing Technology With precision for the future

Without microchips,

the modern world stands still

Our everyday lives are becoming increasingly digital, smart, and connected – with computing power expanding all the time. This is only possible with microchips that are smaller, more powerful and more energy-efficient. Co-founder of Intel Gordon Moore stated in the eponymous law that the number of transistors on a computer chip doubles every two years.

This can only be achieved

with absolute precision

ZEISS SMT creates the basis for Moore's Law to continue to be written. Through our diverse product portfolio, we cover a wide range of key processes in microchip manufacturing, including optical lithography, process control and mask optimization. This is how we empower chipmakers around the world.

Without foresight,

we wouldn't be here

For example, around 25 years of research and development have gone into innovative EUV lithography. We are already working on the next technological leap in semiconductor technology. At seven sites and with partners in Europe and worldwide. For even more precise processes. For even more powerful smartphones. For Industry 4.0 and autonomous driving. For the future.

ZEISS SMT in figures

6,000

Colleagues work on pioneering innovations for the semiconductor industry – and the SMT team continues to grow
2.757

Billion € revenue of SMT in the fiscal year 2021/2022
2020

ZEISS, TRUMPF and the Fraunhofer Institute (IOF) receive the German Future Prize for EUV lithography
1,200

International partners in the development network
2,000

ZEISS holds patents in the field of EUV technology

SMT milestones

Driving digitalization for over 50 years

ZEISS looks back on over 175 years of experience. ZEISS SMT has been an enabler and driver of the semiconductor technology for over 50 years.
1968

1968

First ZEISS optics for a circuit printer

The lens depicted structures of 15 micrometers. The circuit printer from Telefunken was the precursor of the present-day wafer stepper and scanner.
1977

1977

first wafer stepper with ZEISS optics

The S-Planar® 10/0.28 lens with 1 micrometer resolution is used in the first wafer stepper worldwide made by David Mann (later GCA).
1994

1994

The founding of SMT

The Semiconductor Manufacturing Technology (SMT) segment is founded as a standalone business group of ZEISS.
1997

1997

Strategic partnership with ASML

Start of the strategic partnership between ZEISS and Dutch wafer stepper and scanner manufacturer ASM Lithography (now ASML).
1998

1998

First 193 nanometer optics

193 nanometer technology from ZEISS enables the next leap in performance and technology within the semiconductor industry.
2002

2002

Leading position

ASML and SMT become global market leaders in the production of semiconductor manufacturing technology.
2005

2005

Expanding the portfolio

NaWoTec GmbH Rossdorf becomes part of ZEISS SMT. Thus, ZEISS also offers mask repair systems.
2008

2008

Expanding the portfolio

Pixer Technology in Israel becomes part of SMT, adding mask tuning solutions to the portfolio.
2016

2016

Deepening the collaboration

ASML becomes minority shareholder of ZEISS SMT.
2017

2017

New business

ZEISS Process Control Solutions is founded, supplementing the ZEISS SMT portfolio with process control solutions for semiconductor customers.
2018

2018

Anniversary

Celebrating 50 years of ZEISS SMT.
2019

2019

EUV in smartphones

The first chips manufactured using EUV lithography arrive on the mass market in the new smartphone generations.
2020

2020

Award

EUV lithography is awarded the German Future Prize.
2022

2022

Anniversary

Strategic partnership of ASML and ZEISS SMT

The heart of digitalization beats here – at SMT

If passion meets precision and we grow beyond the limits of what is possible: Then the heart of digitalization beats here. At ZEISS. At the SMT. In Oberkochen, Wetzlar, Jena, Rossdorf, Danvers, Dublin, and Bar Lev. How we today already enable the technologies of tomorrow? See for yourself and feel it, the heartbeat of digitalization!

Click on the markers to open the information box for more details.

ZEISS SMT sites

Oberkochen, Jena, Wetzlar, Rossdorf, Danvers, Dublin and Bar Lev

Jena

Carl-Zeiss-Promenade 10
07745 Jena
Germany

Phone: +49 3641 64-2563
Fax: +49 3641 64-2938
info.smt@zeiss.com

Bar Lev

HaDolev 3, P.O. Box 32
Bar Lev Industrial Park
D.N. Misgav 2015600
Israel

Phone: +972 4 9088 602
Fax: +972 4 9088 666
info.smt@zeiss.com

Rossdorf

Industriestraße 1
64380 Rossdorf
Germany

Phone: +49 6154 8038-0
Fax: +49 6154 8038-80
info.smt@zeiss.com

Wetzlar

Gloelstrasse 3-5
35576 Wetzlar
Germany

Phone: +49 6441 404-0
Fax: +49 6441 404-203
info.smt@zeiss.com

Oberkochen

Rudolf-Eber-Strasse 2
73447 Oberkochen
Germany

Phone: +49 7364 20-0
Fax: +49 7364 20-6808
info.smt@zeiss.com

Danvers

Carl Zeiss SMT, Inc.
75 Sylvan St., Suite 101
Danvers, MA 01923

info.smt@zeiss.com

Dublin

ZEISS Innovation Center California
5300 Central Parkway
Dublin, CA 94568

info.smt@zeiss.com

Andreas Pecher

ZEISS Executive Board Member | President & Chief Executive Officer

A physics graduate with master's degrees in physics, business administration and engineering management, he has been CEO of ZEISS Semiconductor Manufacturing Technology (SMT) since January 2022. He is also a member of the Executive Board at Carl Zeiss AG.
Torsten Reitze

Chief Financial Officer

The business graduate has been a Member of the Management Board at ZEISS Semiconductor Manufacturing Technology (SMT) since 2018, as a Commercial Director. He previously held the same position in the areas of Industrial Metrology at ZEISS and ZEISS Semiconductor Manufacturing Optics (SMO).
Christoph Hensche

Chief Operating Officer & Digital Transformation Officer

The engineer with an MBA is Chief Operating Officer & Digital Transformation Officer at ZEISS Semiconductor Manufacturing Technology (SMT) since 2022. Previously, he was Head of ZEISS Semiconductor Mask Solutions (SMS). Christoph Hensche started at ZEISS SMT in 2005 as a project manager for various R&D projects, was responsible for the Sales division of Lithography Optics from 2010 and subsequently headed the Field of Business DUV of ZEISS Semiconductor Manufacturing Optics (SMO).
Dr. Frank Rohmund

President ZEISS Semiconductor Manufacturing Optics

The physicist, who holds a doctorate, has been President of ZEISS Semiconductor Manufacturing Optics (SMO) since 2022. He previously headed the Field of Business EUV at SMO Frank Rohmund started as a research assistant at ZEISS Semiconductor Manufacturing Technology (SMT) in 2001.
Dr. Clemens Neuenhahn

Head of ZEISS Semiconductor Mask Solutions

As physicist, Dr. Clemens Neuenhahn is head of the ZEISS Semiconductor Mask Solutions (SMS) business unit at ZEISS Semiconductor Manufacturing Technology (SMT). Previously, he was in charge of SMT's strategic business development since January 2021.
Dr. Stefan Preuss

Head of ZEISS Process Control Solutions

The chemist with a PhD has headed the ZEISS Process Control Solutions (PCS) strategic business unit since 2020. In 2012, he joined ZEISS Semiconductor Manufacturing Technology (SMT) as Head of Strategic Business Development. He previously worked in various roles, including that of Management Consultant for ZEISS SMT and ZEISS Meditec.
Dr. Thomas Stammler

Chief Technology Officer

With a doctorate in physics, he has been Chief Technology Officer (CTO) and Head of Product Strategy at ZEISS Semiconductor Manufacturing Technology (SMT) since 2021. Thomas Stammler has held various positions at ZEISS SMT since 1998, most recently as Head of Design & Technology.
Dr. Jens Werner

Head of Human Resources

Since 2017, Jens Werner has been Head of Human Resources at ZEISS Semiconductor Manufacturing Technology (SMT). With a doctorate in law, he joined ZEISS in 2004 and has already held various management positions in the area of human resources.