Production work at ZEISS SMT
About us

ZEISS Semiconductor Manufacturing Technology

With precision for the future

Without microchips,

the modern world stands still

Our everyday lives are becoming increasingly digital, smart, and connected – with computing power expanding all the time. This is only possible with microchips that are smaller, more powerful and more energy-efficient. Co-founder of Intel Gordon Moore stated in the eponymous law that the number of transistors on a computer chip doubles every two years.

This can only be achieved

with absolute precision

ZEISS SMT creates the basis for Moore's Law to continue to be written. Through our diverse product portfolio, we cover a wide range of key processes in microchip manufacturing, including optical lithography, process control and mask optimization. This is how we empower chipmakers around the world.

Without foresight,

we wouldn't be here

For example, around 25 years of research and development have gone into innovative EUV lithography. We are already working on the next technological leap in semiconductor technology. At seven sites and with partners in Europe and worldwide. For even more precise processes. For even more powerful smartphones. For Industry 4.0 and autonomous driving. For the future.

ZEISS SMT in figures

  • 5,000

    Colleagues work on pioneering innovations for the semiconductor industry – and the SMT team continues to grow

  • 2.298

    Billion € revenue of SMT in the fiscal year 2020/2021

  • 2020

    ZEISS, TRUMPF and the Fraunhofer Institute (IOF) receive the German Future Prize for EUV lithography

  • 1,200

    International partners in the development network

  • 2,000

    ZEISS holds patents in the field of EUV technology

  • SMT milestones

    Driving digitalization for over 50 years

    ZEISS looks back on over 175 years of experience. ZEISS SMT has been an enabler and driver of the semiconductor technology for over 50 years.  

  • first ZEISS SMT circuit printer from 1968

    First ZEISS optics for a circuit printer

    The lens depicted structures of 15 micrometers. The circuit printer from Telefunken was the precursor of the present-day wafer stepper and scanner.

  • first wafer stepper with ZEISS SMT optics

    first wafer stepper with ZEISS optics

    The S-Planar® 10/0.28 lens with 1 micrometer resolution is used in the first wafer stepper worldwide made by David Mann (later GCA).


  • EUV illumination system from ZEISS SMT

    The founding of SMT

    The Semiconductor Manufacturing Technology (SMT) segment is founded as a standalone business group of ZEISS.

  • Logo of ZEISS SMT partner ASML

    Strategic partnership with ASML

    Start of the strategic partnership between ZEISS and Dutch wafer stepper and scanner manufacturer ASM Lithography (now ASML).

  • First 193 nanometer optics from ZEISS SMT

    First 193 nanometer optics

    193 nanometer technology from ZEISS enables the next leap in performance and technology within the semiconductor industry.

  • Microchip structures facilitate new technologies

    Leading position

    ASML and SMT become global market leaders in the production of semiconductor manufacturing technology.

  • ZEISS Semiconductor Mask Solutions building in Rossdorf

    Expanding the portfolio

    NaWoTec GmbH Rossdorf becomes part of ZEISS SMT. Thus, ZEISS also offers mask repair systems.

  • Building of Pixer Isreal as part of ZEISS SMT

    Expanding the portfolio

    Pixer Technology in Israel becomes part of SMT, adding mask tuning solutions to the portfolio.

  • ZEISS SMT staff in the clean room

    Deepening the collaboration

    ASML becomes minority shareholder of ZEISS SMT.

  • Two employees of SMT Process Control Solutions chat in the ZEISS SMT clean room

    New business

    ZEISS Process Control Solutions is founded, supplementing the ZEISS SMT portfolio with process control solutions for semiconductor customers.

  • Anniversary celebration with management marking 50 years of ZEISS SMT - photographed in front of lithography optics


    Celebrating 50 years of ZEISS SMT.

  • EUV technology from ZEISS SMT is deployed in the latest smartphones

    EUV in smartphones

    The first chips manufactured using EUV lithography arrive on the mass market in the new smartphone generations.


  • Frank-Walter Steinmeier presents the ZEISS SMT team with the German Future Prize 2020 for EUV technology


    EUV lithography is awarded the German Future Prize.

Semiconductor Manufacturing Technology from ZEISS

Shaping technological progress

The corporate structure of ZEISS SMT with all Business Units
The corporate structure of ZEISS SMT with all Business Units
The corporate structure of ZEISS SMT with all Business Units

Through our product portfolio and world-leading know-how, we cover various key processes in the manufacture of microchips. Our products include semiconductor manufacturing optics – notably lithography optics – photomask systems as well as process control solutions for the semiconductor manufacturing industry. Thanks to technologies from ZEISS, microchips are becoming increasingly smaller, more powerful, more energy-efficient – and more cost-effective. The electronic equipment in which these products are installed fosters global progress in a variety of disciplines, including technology, electronics, communications, entertainment, mobility and energy. Semiconductor Manufacturing Technology (SMT) is headquartered in Oberkochen. Additional sites are located in Jena, Rossdorf and Wetzlar (Germany), Bar Lev (Israel) as well as Dublin and Danvers (USA).


The heart of digitalization beats here – at SMT

If passion meets precision and we grow beyond the limits of what is possible: Then the heart of digitalization beats here. At ZEISS. At the SMT. In Oberkochen, Wetzlar, Jena, Rossdorf, Danvers, Dublin, and Bar Lev. How we today already enable the technologies of tomorrow? See for yourself and feel it, the heartbeat of digitalization!

Click on the markers to open the information box for more details.


Oberkochen, Jena, Wetzlar, Rossdorf, Danvers, Dublin and Bar Lev

Map of the world with all ZEISS SMT sites in Germany (Oberkochen, Rossdorf, Jena, Wetzlar), Israel (Bar Lev) and USA (Dublin, Peabody)

Carl-Zeiss-Promenade 10
07745 Jena

Phone: +49 3641 64-2563
Fax: +49 3641 64-2938

Bar Lev

HaDolev 3, P.O. Box 32
Bar Lev Industrial Park
D.N. Misgav 2015600

Phone: +972 4 9088 602
Fax: +972 4 9088 666


Industriestraße 1
64380 Rossdorf

Phone: +49 6154 8038-0
Fax: +49 6154 8038-80


Gloelstrasse 3-5
35576 Wetzlar

Phone: +49 6441 404-0
Fax: +49 6441 404-203


Rudolf-Eber-Strasse 2
73447 Oberkochen

Phone: +49 7364 20-0
Fax: +49 7364 20-6808


Carl Zeiss SMT, Inc.
75 Sylvan St., Suite 101
Danvers, MA 01923


ZEISS Innovation Center California
5300 Central Parkway
Dublin, CA 94568

  • Portrait Andreas Pecher President & Chief Executive Officer of ZEISS SMT in Oberkochen, Germany

    Andreas Pecher

    ZEISS Executive Board Member | President & Chief Executive Officer

    A physics graduate with master's degrees in physics, business administration and engineering management, he has been CEO of ZEISS Semiconductor Manufacturing Technology (SMT) since January 2022. He is also a member of the Executive Board at Carl Zeiss AG.

  • Portrait of Torsten Reitze as Chief Financial Officer of ZEISS SMT in Oberkochen, Germany

    Torsten Reitze

    Chief Financial Officer

    The business graduate has been a Member of the Management Board at ZEISS Semiconductor Manufacturing Technology (SMT) since 2018, as a Commercial Director. He previously held the same position in the areas of Industrial Metrology at ZEISS and ZEISS Semiconductor Manufacturing Optics (SMO).

  • Portrait of Dr. Christoph Hensche as Head of ZEISS Semiconductor Mask Solutions in Jena

    Christoph Hensche

    Chief Operating Officer & Digital Transformation Officer

    The engineer with an MBA is Chief Operating Officer & Digital Transformation Officer at ZEISS Semiconductor Manufacturing Technology (SMT) since 2022. Previously, he was Head of ZEISS Semiconductor Mask Solutions (SMS). Christoph Hensche started at ZEISS SMT in 2005 as a project manager for various R&D projects, was responsible for the Sales division of Lithography Optics from 2010 and subsequently headed the Field of Business DUV of ZEISS Semiconductor Manufacturing Optics (SMO).


  • Portrait of Dr. Frank Rohmund as President of ZEISS Semiconductor Manufacturing Optics in Oberkochen, Germany

    Dr. Frank Rohmund

    President ZEISS Semiconductor Manufacturing Optics

    The physicist, who holds a doctorate, has been President of ZEISS Semiconductor Manufacturing Optics (SMO) since 2022. He previously headed the Field of Business EUV at SMO Frank Rohmund started as a research assistant at ZEISS Semiconductor Manufacturing Technology (SMT) in 2001.

  • Portrait of Dr. Clemens Neuenhahn in his role as Head of ZEISS Semiconductor Mask Solutions

    Dr. Clemens Neuenhahn

    Head of ZEISS Semiconductor Mask Solutions

    As physicist, Dr. Clemens Neuenhahn is head of the ZEISS Semiconductor Mask Solutions (SMS) business unit at ZEISS Semiconductor Manufacturing Technology (SMT). Previously, he was in charge of SMT's strategic business development since January 2021.

  • Portrait of Dr. Stefan Preuss as Head of ZEISS Process Control Solutions in the USA

    Dr. Stefan Preuss

    Head of ZEISS Process Control Solutions

    The chemist with a PhD has headed the ZEISS Process Control Solutions (PCS) strategic business unit since 2020. In 2012, he joined ZEISS Semiconductor Manufacturing Technology (SMT) as Head of Strategic Business Development. He previously worked in various roles, including that of Management Consultant for ZEISS SMT and ZEISS Meditec.


  • Portrait of Dr. Thomas Stammler as Chief Technology Officer of ZEISS SMT in Oberkochen, Germany

    Dr. Thomas Stammler

    Chief Technology Officer

    With a doctorate in physics, he has been Chief Technology Officer (CTO) and Head of Product Strategy at ZEISS Semiconductor Manufacturing Technology (SMT) since 2021. Thomas Stammler has held various positions at ZEISS SMT since 1998, most recently as Head of Design & Technology.

  • Portrait of Dr. Jens Werner as Head of Human Resource at ZEISS SMT in Oberkochen, Germany

    Dr. Jens Werner

    Head of Human Resources

    Since 2017, Jens Werner has been Head of Human Resources at ZEISS Semiconductor Manufacturing Technology (SMT). With a doctorate in law, he joined ZEISS in 2004 and has already held various management positions in the area of human resources.

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