Semiconductor Manufacturing Technology
Mask Solutions Support
Customer care

Mask solutions support Your seamless operations sustained with comprehensive and flexible support packages.



  • Ensuring optimum tool performance, high uptime and availability at reasonable cost of ownership
  • Offering highly skilled and resourced infrastructure in all major international markets
  • Enabling long-term operations
Remote assistance

Remote assistance Fast and flexible customer support by using AR technologies

As a leader in innovation, ZEISS is using pioneering technologies to enhance service excellence. Augmented reality solutions enable us to care for our customers worldwide fast and effective. Especially live remote assistance via the Microsoft HoloLens is very beneficial for Mask Shops. Local service engineers can be supported and guided by headquarter specialists in installing new software features or solving tool problems.

Using the Microsoft HoloLens can connect people quickly for collaborative problem solving at full speed. People on site can work side by side with experts on remote locations helping in real-time.

The new technology is cost-effective, accelerates reaction time and allows for having a technology specialist “onside” whenever needed. Customers clearly benefit from the reduced MTTR and increased product uptime. Of course, the use of augmented reality solutions fully considers customer´s data privacy and data security guidelines.

Finally, applying digital technologies contributes to our sustainability goals and reduces our carbon footprint.

Remote assist solutions at ZEISS

maximizing support efficiency

ZEISS Predict Program

Updated customer care program. Both contract types can be combined with consumables coverage, response time man-on-site, 24/7 support and further options. For entire overview please scroll down. If you have special needs or require customization, please contact us. Together we will find a solution matching your processes.

ZEISS Predict basis

Predict | basic

With ZEISS Predict | basic we ensure timely access to spares and support priority along with high tool performance and availability at the lowest cost. Predict | basic covers all required wearing parts and labor hours to perform our proactive annual maintenance program on an annually basis.

ZEISS Predict Premium

Predict | premium

If you are looking for a fixed cost of ownership and no risk solution along with high uptime, we are pleased to offer you ZEISS Predict | premium. Take complete control of the cost by including labor costs and costs for spare parts in your Predict | premium service agreement.

We make your service outlay entirely predictable. Your budget is not affected by unforeseen costs: maximum performance and availability are factored into a single superior protection plan. This contract is available for all our systems.

At a glance

Support whenever needed

Service
Predict | basic
Predict | premium
Priority escalation
X
X
Priority parts delivery
X
X
Matching to original spec
X
X
Optimized local parts stock
X
X
CIP of hard- and software updates
X
X
High uptime, MTBF
X
PM Parts & PM Labor coverage
X
X
All Parts coverage & standard labor
X
X
X

Combinable options The following options can be added to the Predict | basic or Predict | premium contract.

  • Consumables coverage

    Covers annually consumable consumption.

  • Response time agreement

    Guaranteed in-time onsite support agreement.

  • Man-on-site

    No travel time and quick response due to ZEISS engineers are based at fab.

  • 24/7 Support

    ull support around the clock.

  • Remote Service

    ZEISS remote support solutions.

  • Uptime agreement

    Agreement on individual performance KPIs.

Additional Support Offerings In regards to you requirements you can individually add service offerings. If you would like to find out more, please contact your local Service Representative.

  • Upgrade Options

    Some of our photomask systems are developed to have additional capabilities, often with an upgrade path to maximise their application space and usage in the market. Such options or upgrades can address both technical capability and productivity of our equipment.

  • Spares

    For those customers who demand additional peace of mind ZEISS is able to tailor spares packages on all product lines that can be made available and shipped to the field. Customers who enter into the Predict program can benefit from preferential pricing for such packages. Together with our three key spare hubs in Europe, Asia and the US the program operates fast and smooth.

  • Consulting

    As an integral part of Predict we offer consulting services that can act not only on the tool, but also at the fab level. Using the extensive industry knowledge of our specialists we have the ability to uncover solutions that are not always visible to single organisations. Such can include specific maintenance activities or process optimization for tools.

  • Refurbishment

    Refurbishing is ideal for equipment in the field which is used for many years and across many technologies. Combining high skill levels with state of the art testing and support can ensure that every tool conforms to original specifications, meets all relevant safety standards and includes the latest licenced system software.

The ZEISS Sales and Service Center together with our three key spare hubs in Europe (Germany), Asia (Taiwan) and USA (San Francisco), ZEISS Predict provides the highest assurance for seamless manufacturing.

Find your nearest Sales and Service Center

Tokyo, Japan Tokyo, Japan

Carl Zeiss Co. Ltd.
ZEISS Group
22 Honshio-cho, Shinjuku-ku Tokyo 160-0003
Japan
Tel. +81 3 3355 0256
Fax +81 3 3358 7554
info@zeiss.co.jp

Hsinchu City, Taiwan Hsinchu City, Taiwan

Carl Zeiss Co. Ltd.
5F-1, No. 158, Section 2 Gongdao 5th Rd.
Hsinchu City 300
Taiwan
Tel. +88 63 577 6316
info.smt@zeiss.com

Bundang-gu Seongnam-si, South Korea Bundang-gu Seongnam-si, South Korea

Carl Zeiss Co. Ltd.
13F, SONO Tower,135, Beobwon-Ro, Songpa-Gu
Seoul, 05836
Republic of Korea

Jena, Germany Jena, Germany

Carl Zeiss SMT GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany

info.sms@zeiss.com

San Francisco, USA San Francisco, USA

Carl Zeiss SBE, LLC
ZEISS Group
One Zeiss Drive
Thornwood, NY 10594
USA
Tel. +1 855 253 8126
Fax +1 914 459 0096
info.smt@zeiss.com

Shanghai, China Shanghai, China

Carl Zeiss Co. Ltd.
No. 60 Meiyue Rd.
200131 Shanghai
China

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