Webinar
New Protocols for the Fabrication of Atom Probe Specimens
with LaserFIBs
1 October 2021
· 17 min watch
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Author
Dr. Fabián Pérez Willard
Materials Science Sector Solutions Manager Nanoscience & Nanomaterials
ZEISS Microscopy
ZEISS Microscopy
Abstract
New Protocols for the Fabrication of Atom Probe Specimens with LaserFIBs
LaserFIB offer new possibilities for Atom Probe Tomography (APT) sample preparation. They combine rapid machining in the macroscopic scale with most precise FIB machining.
Two workflows are presented for:
1. the preparation of deeply buried ROIs, and
2. the so-called “moat” preparation with extremely high throughput
Key Learnings:
- The laser allows to prepare APT samples from deeply buried ROIs.
- The laser speeds up the "moat" preparation isolating the ROI rapidly from the bulk.
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