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ZEISS EVO - Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications
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ZEISS EVO Family Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

  • Versatile solution for central microscopy facilities or industrial quality assurance laboratories
  • Excellent images from any real-world sample
  • Maximum image quality with the lanthanum hexaboride (LaB6) emitter
  • Imaging and analytical excellence on non-conductive and uncoated samples
  • Workflow automation and data integrity

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SmartSEM Touch user interface supports industrial operators who require automated workflows for repeatable inspection tasks.

Class-Leading Usability

SmartSEM Touch puts interactive workflow control directly at your fingertips. It is quick and easy to learn, dramatically reducing training effort and costs. Within minutes, even new users will begin capturing stunning images. This user interface also supports industrial operators who require automated workflows for repeatable inspection tasks.

Flint, ferrocerium particle from a firelighter, imaged with ZEISS EVO, HDBSD detector.

Excellent Image Quality

EVO excels at extracting the maximum data quality from uncoated and unaltered samples. EVO also safeguards data quality on hydrated and heavily contaminated samples, by allowing these samples to remain in their native state. Additionally, the LaB6 emitter will give that extra bit of resolution, contrast and signal-to-noise that is important when imaging and microanalysis get challenging.

Caption:  Flint, ferrocerium particle from a firelighter, imaged with ZEISS EVO, HDBSD detector.

EVO can be configured to be part of a semi-automated multi-modal workflow, with tools for seamless relocation of regions of interest and integrity of data collected from multiple modalities.

EVO Plays Well with Others

EVO can be configured to be part of a semi-automated multi-modal workflow, with tools for seamless relocation of regions of interest and integrity of data collected from multiple modalities. Combine light and electron microscope data for material characterization or parts inspection. Or combine EVO with ZEISS light microscopes for correlative particle analysis.

Get More Hands on Deck

Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. EVO takes both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-micoscopists.

Expert users have access to advanced imaging parameters and analysis functions.
Expert users have access to advanced imaging parameters and analysis functions.
Novice users have access to predefined workflows and the most frequently used parameters – perfect for a beginner.
Novice users have access to predefined workflows and the most frequently used parameters – perfect for a beginner.

Intelligent Navigation and Imaging

Improve Your Sample Throughput, Productivity and Performance
  • ZEISS Navigation Camera

    ZEISS Navigation Camera

    A camera can be mounted either to the chamber to monitor the position of the samples relative to the pole piece mounted backscattered detector (chamberscope); or on the vacuum chamber door (navigation camera) to enable a helicopter view of the arrangement of samples or parts on the sample holder. This view can then be used to set up predefined locations of interest identified from a light microscope image, and for easy navigation during the entire sample investigation process.

  • ZEISS Automated Intelligent Imaging

    Automated Intelligent Imaging

    EVO enables automated, unattended acquisition of images across sample batches. ZEISS Automated Intelligent Imaging is perfectly suited to routine inspection. It enables the user to define a boundary region, automatically generate regions of interest determined by the required field of view or magnification, and begin automated acquisition. Automated Intelligent Imaging will improve your sample throughput, boosting productivity and performance.

Take Your Investigation to the Next Level

Catalyst particles imaged at high magnification and low kV (left: Tungsten, right: LaB6). At challenging imaging conditions, LaB6 users benefit from up to 10 times more beam brightness, resulting in improved image resolution and contrast.
Catalyst particles imaged at high magnification and low kV (left: Tungsten, right: LaB6). At challenging imaging conditions, LaB6 users benefit from up to 10 times more beam brightness, resulting in improved image resolution and contrast.
Catalyst particles imaged at high magnification and low kV (left: Tungsten, right: LaB6). At challenging imaging conditions, LaB6 users benefit from up to 10 times more beam brightness, resulting in improved image resolution and contrast.

Better Data with a Lanthanum Hexaboride (LaB6) Electron Emitter

Electron emission from a lanthanum hexaboride cathode, rather than a traditional tungsten hairpin filament, provides the reassurance that every extra bit of image quality is there when you need it. And that is a benefit you can put into action in two ways:

  • At equivalent electron probe sizes (i.e. resolution), there is more probe current to work with, which makes image navigation and optimization much easier.
  • At equivalent probe currents (signal-to-noise), the beam diameter is much smaller, resulting in enhanced image resolution.

EVO Plays Well with Others

Benefit from Workflow Automation and Correlative Microscopy
EVO and the ecosystem of ZEN core
EVO and the ecosystem of ZEN core

1. post-acquisition analysis, 2. contextual analysis, 3. integrated reporting, 4. automated segmentation

EVO and the ecosystem of ZEN core: exchange samples and data between, visualize and organize data across scales and modalities, perform metals applications and image analysis based on deep learning.

Expand Your Possibilities with ZEISS ZEN core

Your Software Suite for Connected Microscopy and Image Analysis

With ZEISS being the supplier of microscopy and metrology systems, you can expect EVO to play extremely well with other ZEISS solutions. Establish a highly-productive multi-modal workflow between (digital) light microscopes and EVO. Combine the unique optical contrast methods of your light microscope with the equally unique imaging and analytical methods of your SEM to obtain complementary data, and hence more meaningful information about the material, quality or failure mechanism of your sample.

Take advantage of ZEN core as your hub for connected microscopy. Customize its functions to your specific applications and define workflows that consider the experience level of the  microscopists in your multi-user environment.

Enjoy its highlights:

  • Correlative Microscopy: Sample and data exchange between light, digital, and electron microscopes
  • Contextual Data Representation: Data visualization and organization across scales and imaging modalities
  • Metallographic Applications incl. Microsoft Word-based Reporting: Integrated reporting across connected images and datasets
  • Automated Image Analysis: based on deep learning: Image segmentation based on machine learning algorithms.

EDX Solutions for Microanalysis Applications

If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.
  • ZEISS SmartEDX - Optimized for routine microanalysis applications

    Optimized for Routine Microanalysis Applications

    SEM and EDS have to be paired with careful consideration. SmartEDX on EVO is ideally suited for routine microanalysis applications, particularly for customers with high standards for data reproducibility. It provides highest throughput at 129 eV energy resolution and 1-5 nA probe current – typical EVO operating condition. SmartEDX is optimized to detect low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window.

    Workflow-guided graphical user interface
    Workflow-guided graphical user interface

    Workflow-guided graphical user interface

    Workflow-Guided Graphical User Interface

    SmartEDX is developed to improve both ease of use and workflow repeatability in multi-user environments. Like other ZEISS workflow-guided software solutions, such as SmartSEM Touch or ZEN core,   for EVO, the SmartEDX software is easy to learn and intuitive to use. It helps ensure repeatable execution of analytical tasks on the SEM, particularly in environments where more than one operator will be using the system. SmartEDX is available either as the best price-performance EDS detector in a fixed configuration, or as the flexible and still convenient slider version.

  • Simplify Operation and collect EDS data more efficiently
    Simplify Operation and collect EDS data more efficiently

    Simplify Operation and collect EDS data more efficiently

    Simplify Operation and Collect EDS Data More Efficiently

    Control both EDS and SEM in parallel using one single PC. This integration improves usability. At the same time, you will enjoy dedicated user interfaces for your microscope and your EDS system. Reduce your EDS acquisition time by leveraging the optimized detector integration that boosts the EDS signal inputs by at least 17%.

    Choose between different EDX detector configurations
    Choose between different EDX detector configurations

    Choose between different EDX detector configurations

    Choose between Different EDX Detector Configurations

    The single PC solution offers you various EDS configurations: the Xplore 15, 30 and the Ultim Max 40 detectors from Oxford Instruments can be ordered.  

  • Streamline the Service of Your SEM and EDS System

    Total ZEISS Service and System Support

    Because SmartEDX is supported entirely by ZEISS, this EDS solution is ideal for customers with a vested interest in streamlining their number of analytical equipment suppliers. All installation, preventive maintenance, warranty, diagnostics and repair, spare part logistics, and inclusion in total system service contracts are fully handled by ZEISS, making support of your analytical SEM solution easy.

The EVO Family

ZEISS EVO 10
ZEISS EVO 15
ZEISS EVO 25

Choose EVO 10—with optional backscatter detector and Element EDS system—to be your entry point to scanning electron microscopy, at a remarkably affordable price. Even this smallest of EVO vacuum chambers is well differentiated from tabletop SEMs. Your investment in EVO now assures that you are ready for applications that require more space and ports than you anticipate today.

EVO 15 demonstrates the flexibility concept of the EVO family and excels in analytical applications. Opt for the larger vacuum chamber of the EVO 15, and add variable pressure for imaging and analysis of non-conductive samples or parts, and you have a versatile, multi-purpose solution for central microscopy facilities or industrial quality assurance laboratories.

EVO 25 is the industrial workhorse solution with enough space to accommodate even the largest parts and assemblies. Expand EVO 25 capabilities further with an optional 80 mm Z travel stage that can handle weights up to 2 kg even with tilt. Additionally, the large chamber will accommodate multiple analytical detectors for the most demanding microanalysis applications.

Maximum specimen heights

100 mm

145 mm

210 mm

Maximum specimen diameter

230 mm

250 mm

300 mm

Motorized stage travel XYZ

80 x 100 x 35 mm

125 x 125 x 50 mm

130 x 130 x 50 (or 80) mm

High Vacuum (HV) mode

Best quality imaging and analysis on conductive samples

✓

✓

✓

Variable Pressure (VP) mode

High quality imaging and analysis on uncoated, non-conductive samples

✓

✓

✓

Extended Pressure (EP) mode

Environmental imaging of hydrated or contaminated samples in their natural state

✓

✓

✓

Accessories

An uncoated Radiolaria alga was imaged at 1 keV landing energy. Imaging without beam deceleration shows charging artifacts.
An uncoated Radiolaria alga was imaged at 1 keV landing energy. After applying beam deceleration, surface details and contrast are improved and charging artifacts are reduced.
An uncoated Radiolaria alga was imaged at 1 keV landing energy. Imaging without beam deceleration shows charging artifacts (left). After applying beam deceleration, surface details and contrast are improved and charging artifacts are reduced (right).

Beam Deceleration Imaging

Use beam deceleration imaging to investigate especially delicate specimens. Gain improved image quality and minimize sample damage. Image non-conducting specimens with higher resolution, more surface sensitivity, and more contrast. A bias voltage is applied to your sample. This reduces the effective landing energy on your sample while the primary energy is kept high.

Applications

  • Zinc-phosphate E-coating, imaged with SE detector in high vacuum.
  • Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.
  • Stainless steel fracture surface, imaged with secondary electrons in high vacuum.
  • Zinc-phosphate E-coating, imaged with SE detector in high vacuum.
    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.
  • Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.
    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.
  • Stainless steel fracture surface, imaged with secondary electrons in high vacuum.
    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

Manufacturing & Assembly Industries

  • Quality analysis / quality control
  • Failure analysis / metallography
  • Cleanliness inspection
  • Morphological and chemical analysis of particles to meet ISO 16232 and VDA 19 part 1 & 2 standards
  • Analysis of non-metallic inclusions
  • Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.
  • Corroded Nickel layer imaged with secondary electrons.
  • SE image revealing whisker growth on an electronic device.
  • Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.
    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.
  • Corroded Nickel layer imaged with secondary electrons.
    Corroded Nickel layer imaged with secondary electrons.

    Corroded Nickel layer imaged with secondary electrons.

    Corroded Nickel layer imaged with secondary electrons.
  • SE image revealing whisker growth on an electronic device.
    SE image revealing whisker growth on an electronic device.

    SE image revealing whisker growth on an electronic device.

    SE image revealing whisker growth on an electronic device.

Semiconductors & Electronics

  • Visual inspection of electronic components, integrated circuits, MEMS devices and solar cells
  • Copper wire surface and crystal structure investigation
  • Metal corrosion investigations
  • Cross-sectional failure analysis
  • Bonding foot inspections
  • Capacitor surface imaging
  • Cross section of galvanized mild steel, imaged using the SE detector on EVO 15.
  • Surface of S355 steel after grit blasting with F80 grit alumina.
  • Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.
  • Cross section of galvanized mild steel, imaged using the SE detector on EVO 15.
    Cross section of galvanized mild steel, imaged using the SE detector on EVO 15.

    Cross section of galvanized mild steel, imaged using the SE detector on EVO 15.

    Cross section of galvanized mild steel, imaged using the SE detector on EVO 15.
  • Surface of S355 steel after grit blasting with F80 grit alumina.
    Surface of S355 steel after grit blasting with F80 grit alumina.

    Surface of S355 steel after grit blasting with F80 grit alumina.

    Surface of S355 steel after grit blasting with F80 grit alumina.
  • Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.
    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

Steel and Other Metals

  • Imaging and analysis of the structure, chemistry and crystallography of metallic samples and inclusions
  • Phase, particle, weld and failure analysis
  • Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen.
  • Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK.
  • Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.
  • Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen.
    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen.

    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen.

    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen.
  • Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK.
    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK.

    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK.

    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK.
  • Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.
    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

Raw Materials

  • Morphology, mineralogy and compositional analysis of geological samples
  • Imaging and analysis of the structure of metals, fractures, and nonmetallic inclusions
  • Morphological and compositional analysis of raw chemicals and active ingredients during micronization and granulation processes
  • Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.
  • Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.
  • Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.
  • Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.
    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.

    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.

    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.
  • Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.
    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.

    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.

    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.
  • Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.
    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

Materials Science Research

  • Characterization of both conductive and non-conductive material samples for research purposes
  • False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.
  • Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.
  • Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.
  • False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.
    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.

    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.

    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.
  • Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.
    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.

    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.

    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.
  • Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.
    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

Life Sciences

  • Research into plants, animals and micro-organisms
  • Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.
  • The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.
  • The mark from a firing pin on a gun casing can be used to help identify the weapon used.
  • Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.
    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.

    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.

    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.
  • The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.
    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.

    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.

    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.
  • The mark from a firing pin on a gun casing can be used to help identify the weapon used.
    The mark from a firing pin on a gun casing can be used to help identify the weapon used.

    The mark from a firing pin on a gun casing can be used to help identify the weapon used.

    The mark from a firing pin on a gun casing can be used to help identify the weapon used.

Forensics

  • Gunshot residue (GSR)
  • Paint and glass analysis
  • Bank note and coin forgery
  • Hair and fiber comparisons
  • Forensic toxicology

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