ZEISS Axio Imager Vario
Product

ZEISS Axio Imager Vario​

Upright Microscope for Large Samples​

Analyze smallest MEMS sensors or an entire flat panel with ZEISS Axio Imager Vario. Its column design allows you to investigate extremely large specimens simultaneously offering high stability. Moreover, Axio Imager Vario is certified for use in clean rooms.

  • Examine large samples​
  • Clean room compatible​
  • In focus at all times
Examine Large Samples​

Examine Large Samples​

Select a manual or a motorized column, take advantage of being able to investigate specimens with a maximum size of 300 mm × 300 mm and a maximum height of 254 mm. Whether dealing with heavy samples or working in combination with the confocal laser scanning microscope ZEISS LSM for materials – the sturdy column design provides reliable stability and prevents vibrations.​

Certified for Clean Room Work​

Certified for Clean Room Work​

Wafer and photomask inspections are subject to extremely strict requirements concerning cleanliness. Therefore, they are done in clean rooms. These are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992).

Auto Focus - In Focus at All Times​

In Focus at All Times​

When examining reflective, low-contrast surfaces simply equip your Axio Imager Vario with the efficient Hardware Auto Focus. It guarantees high precision for both reflected and transmitted light. The sensor detects changes in the focus position and any deviations are compensated automatically. Even large specimens remain perfectly focused while being moved.

TFT Display, brightfield, transmitted light, red, green and blue subpixels
TFT Display, brightfield, transmitted light, red, green and blue subpixels

TFT Display, brightfield, transmitted light, red, green and blue subpixels

TFT Display, brightfield, transmitted light, red, green and blue subpixels
TFT Display, brightfield, transmitted light, red, green and blue subpixels

TFT Display, brightfield, transmitted light, red, green and blue subpixels

Hardware Auto Focus​

Materials research and industrial production require a focus that ensures high precision levels of max. 0.3 times the objective’s depth of field. Benefit from a focusing system with a lock-in range of up to 12000 µm. Use the auto focus for your applications in reflected light and transmitted light, in brightfield, darkfield, polarization contrast, differential interference contrast and oblique illumination. ​

Applications

Discover Metalographic Applications of Axio Imager Vario for Materials.

  • Wood. Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
  • Circuit Board​. Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
  • Wafer. Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95
  • Monocrystalline Silicon Solar Cell. Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95
  • Wood. Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30

    Wood

    Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30

    Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30

    Wood. Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30

  • Circuit Board​. Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13

    Circuit Board​

    Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13

    Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13

    Circuit Board​. Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13

  • Wafer. Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

    Wafer

    Wafer. Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

    Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

    Wafer. Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

  • Monocrystalline Silicon Solar Cell. Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

    Monocrystalline Silicon Solar Cell

    Monocrystalline Silicon Solar Cell

    Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

    Monocrystalline Silicon Solar Cell. Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

Downloads

    • ZEISS Axio Imager Vario

      Examine Large Specimens – Automated and Compatible with Clean Rooms

      Pages: 24
      File size: 7 MB
    • Microscope and Measurement Systems for Quality Assurance and Quality Control

      Capture the essentials of your component. Quickly. Simply. Comprehensively.

      Pages: 41
      File size: 4 MB
    • Quality Control of Large-Sized Prismatic Rechargeable Lithium-Ion Batteries Using Light Microscopy

      ZEISS Axio Imager.Z2 Vario

      Pages: 6
      File size: 1 MB
    • ZEISS Axio Imager Vario

      큰 시편 검사 – 클린룸에 적합한 자동화된 장비

      Pages: 24
      File size: 8 MB
    • ZEISS Axio Imager Vario

      Examine grandes amostras – de modo automatizado e compatível com câmaras estéreis.

      Pages: 24
      File size: 7 MB
    • ZEISS Axio Imager Vario

      Examine grandes muestras – Automatización y compatibilidad con salas blancas

      Pages: 24
      File size: 7 MB

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