ZEISS Axio Imager Vario

Upright Microscope for Large Samples

Examine large samples – automated and clean room compatible

Analyze smallest MEMS sensors up to XXL wafer or even entire flat planel panel displays without destroying them. Thanks to the sample height of up to 254 mm and lateral space of up to 300 mm you examine the broadest range of samples with Axio Imager Vario. The column design offers high stability. Take control of your wafer in the clean room. A motorized z-drive in addition with the hardware auto focus ensure the automatic setting of the optimum focus position.

Clean Room
The production of semiconductors and inspection of wafers you proceed in clean rooms. Clean rooms are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992). Use the clean room kit, containing a 7x nosepiece turret, particle protection and sneeze guard.

Highlights

ZEISS Axio Imager Vario: Examine large samples – automated and clean room compatible
  • Profit from the maximum sample height up to 254 mm and lateral sample space up to 300 mm x 300 mm. Choose between two manual and one motorized column with industry compliant 3-button-operation.
  • Axio Imager Vario focuses with the nosepiece on the sample. That means that you can achieve high focusing accuracy and repeatability, especially with heavy samples.
  • With the Hardware Auto Focus you profit from precise, fast focusing of reflective samples, which are poor in contrast.
  • With Axio Imager Vario in combination with LSM 700 you analyze sensitive samples in high resolution without contact.
  • Axio Imager Vario is certified according to DIN EN ISO 14644-1 and meets the requirements of clean room class 5.  

Hardware Auto Focus

TFT Display, brightfield, transmitted light, red, green and blue subpixels
TFT Display, brightfield, transmitted light, red, green and blue subpixels

Combine your Axio Imager Vario with Hardware Auto Focus and profit from precise, fast focusing of reflective samples with a lock-in range of up to 12000 µm. You work with a focus system offering a high precision of 0.3 depth of focus of the objective. Use the auto focus for your applications in reflected light and transmitted light, in brightfield, darkfield, polarization contrast, differential interference contrast and oblique illumination.

Applications

Wood, Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
Wood, Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
Circuit Board, Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
Circuit Board, Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
Wafer, Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95
Wafer, Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95
Monocrystalline Silicon Solar Cell, Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95
Monocrystalline Silicon Solar Cell, Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

Downloads

ZEISS Axio Imager Vario

Examine Large Specimens – Automated and Compatible with Clean Rooms

pages: 24
file size: 7837 kB

Application Note: ZEISS Axio Imager.Z2 Vario

Quality Control of Large-Sized Prismatic Rechargeable Lithium-Ion Batteries Using Light Microscopy

pages: 6
file size: 2026 kB

Microscope and Measurement Systems for Quality Assurance and Quality Control

Capture the essentials of your component. Quickly. Simply. Comprehensively.

pages: 41
file size: 4477 kB

ZEISS Axio Imager Vario

Examine grandes amostras – de modo automatizado e compatível com câmaras estéreis.

pages: 24
file size: 7790 kB

ZEISS Axio Imager Vario

Examine grandes muestras – Automatización y compatibilidad con salas blancas

pages: 24
file size: 7984 kB

ZEISS Axio Imager Vario

큰 시편 검사 – 클린룸에 적합한 자동화된 장비

pages: 24
file size: 8403 kB

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