EVO Family
ZEISS EVO
Scanning Electron Microscope

ZEISS EVO Family

Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

  • Versatile solution for central microscopy facilities or industrial quality assurance laboratories
  • Different chamber sizes and stage options that meet all application requirements – even for large industrial parts and samples
  • Maximum image quality with the Lanthanum Hexaboride (LaB6) emitter
  • Imaging and analytical excellence on non-conductive and uncoated samples
  • Multiple analytical detectors for demanding microanalysis applications

Your Advantages

SmartSEM Touch
SmartSEM Touch
SmartSEM Touch puts interactive workflow control directly at your fingertips.

Class-Leading Usability

SmartSEM Touch puts interactive workflow control directly at your fingertips. It is quick and easy to learn, dramatically reducing training effort and costs. Within minutes, even new users will begin capturing stunning images. This user interface also supports industrial operators who require automated workflows for repeatable inspection tasks.

maximum data quality
maximum data quality
EVO excels at extracting the maximum data quality from uncoated and unaltered samples.

Excellent Image Quality

EVO excels at extracting the maximum data quality from uncoated and unaltered samples. EVO also safeguards data quality on hydrated and heavily contaminated samples, by allowing these samples to remain in their native state. Additionally, the LaB6 emitter will give that extra bit of resolution, contrast and signal-to-noise that is important when imaging and microanalysis get challenging.

EVO can be configured to be part of a semi-automated multi-modal workflow
EVO can be configured to be part of a semi-automated multi-modal workflow
EVO can be configured to be part of a semi-automated multi-modal workflow.

EVO plays well with others

EVO can be configured to be part of a semi-automated multi-modal workflow, with tools for seamless relocation of regions of interest and integrity of data collected from multiple modalities. Combine light and electron microscope data for material characterization or parts inspection. Or combine EVO with ZEISS light microscopes for correlative particle analysis.

Get More Hands on Deck

Easy Operation for Both Experienced and Novice Users

Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. EVO takes both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-micoscopists.

Expert users
Expert users
Preferred UI: SmartSEM

Expert users have access to advanced imaging parameters and analysis functions.

SmartSEM: Interface and controller for experienced users

SmartSEM: Interface and controller for experienced users

SmartSEM: Interface and controller for experienced users
SmartSEM: Interface and controller for experienced users

Novice users
Novice users
Preferred UI: SmartSEM Touch

Novice users have access to predefined workflows and the most frequently used parameters – perfect for a beginner.

SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC

SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC

SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC
SmartSEM Touch: Simplified graphical interface which runs from a touchscreen PC

Intelligent Navigation and Imaging

Improve Your Sample Throughput, Productivity and Performance

ZEISS Navigation Cameras
ZEISS Navigation Cameras
ZEISS Navigation Cameras

ZEISS Navigation Camera

A camera can be mounted either to the chamber to monitor the position of the samples relative to the pole piece mounted backscattered detector (chamberscope); or on the vacuum chamber door (navigation camera) to enable a helicopter view of the arrangement of samples or parts on the sample holder. This view can then be used to set up predefined locations of interest identified from a light microscope image, and for easy navigation during the entire sample investigation process.

Automated Intelligent Imaging
Automated Intelligent Imaging
Automated Intelligent Imaging

Automated Intelligent Imaging

EVO enables automated, unattended acquisition of images across sample batches. ZEISS Automated Intelligent Imaging is perfectly suited to routine inspection. It enables the user to define a boundary region, automatically generate regions of interest determined by the required field of view or magnification, and begin automated acquisition. Automated Intelligent Imaging will improve your sample throughput, boosting productivity and performance.

Take Your Investigation to the Next Level

Better Data with a Lanthanum Hexaboride (LaB6) Electron Emitter

Electron emission from a lanthanum hexaboride cathode, rather than a traditional tungsten hairpin filament, provides the reassurance that every extra bit of image quality is there when you need it. And that is a benefit you can put into action in two ways:

  • At equivalent electron probe sizes (i.e. resolution), there is more probe current to work with, which makes image navigation and optimization much easier.
  • At equivalent probe currents (signal-to-noise), the beam diameter is much smaller, resulting in enhanced image resolution.
Tungsten LaB6

Catalyst particles imaged at high magnification and low kV (left: Tungsten, right: LaB6)
At challenging imaging conditions, LaB6 users benefit from up to 10 times more beam brightness, resulting in improved image resolution and contrast.

EVO Plays Well with Others.

Benefit from Workflow Automation and Correlative Microscopy

Shuttle & Find integrates EVO, compound light microscopes and digital microscopes

Shuttle & Find integrates EVO, compound light microscopes and digital microscopes into a correlative, multi-modal workflow

 

With ZEISS being the leading supplier of a wide range of microscopy and metrology systems, you can expect EVO to play extremely well with other ZEISS solutions.

With Shuttle & Find, the ZEISS hardware and software interface for correlative microscopy, you can establish a highly-productive multi-modal workflow between (digital) light microscopes and EVO. Combine the unique optical contrast methods of your light microscope with the equally unique imaging and analytical methods of SEM to obtain complementary data, and hence more meaningful information about the material, quality or failure mechanism of your sample.

EVO Element EDS

Integrated Energy Dispersive Spectroscopy Solution

Integrated Energy Dispersive Spectroscopy Solution

Integrated Energy Dispersive Spectroscopy Solution

EVO can be configured with the integrated EDS system, EVO Element. The integration improves usability by using only one PC to control both the EDS and the SEM. At the same time, parallel control is possible by having dedicated user interfaces for microscope and EDS control.

The EVO Element EDS solution is the integrated choice, with a price advantage due to this integration of components, and synergies in after-sales service and support.

The EVO Family

Vacuum Chamber Size Options

  ZEISS EVO 10 ZEISS EVO 15 ZEISS EVO 25
  Choose EVO 10—with optional backscatter detector and Element EDS system—to be your entry point to scanning electron microscopy, at a remarkably affordable price. Even this smallest of EVO vacuum chambers is well differentiated from tabletop SEMs. Your investment in EVO now assures that you are ready for applications that require more space and ports than you anticipate today. EVO 15 demonstrates the flexibility concept of the EVO family and excels in analytical applications. Opt for the larger vacuum chamber of the EVO 15, and add variable pressure for imaging and analysis of non-conductive samples or parts, and you have a versatile, multi-purpose solution for central microscopy facilities or industrial quality assurance laboratories. EVO 25 is the industrial workhorse solution with enough space to accommodate even the largest parts and assemblies. Expand EVO 25 capabilities further with an optional 80 mm Z travel stage that can handle weights up to 2 kg even with tilt. Additionally, the large chamber will accommodate multiple analytical detectors for the most demanding microanalysis applications.
Maximum specimen heights 100 mm 135 mm 210 mm
Maximum specimen diameter 200 mm 250 mm 300 mm
Motorized stage travel XYZ 80 x 100 x 35 mm 125 x 125 x 50 mm 130 x 130 x 50 (or 80) mm
High Vacuum (HV) mode
Best quality imaging and analysis
on conductive samples
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Variable Pressure (VP) mode
High quality imaging and analysis
on uncoated, non-conductive samples
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Extended Pressure (EP) mode
Environmental imaging of hydrated or
contaminated samples in their natural state
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ZEISS EVO at Work

Application Examples

  • Manufacturing & Assembly

    Manufacturing & Assembly Industries

    • Quality analysis / quality control
    • Failure analysis / metallography
    • Cleanliness inspection
    • Morphological and chemical analysis of particles to meet ISP 16232 and VDA 19 part 1 & 2 standards
    • Analysis of non-metallic inclusions
    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.
    Zinc-phosphate E-coating, imaged with SE detector in high vacuum.

    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.
    Car seat cushion foam, imaged uncoated in Variable Pressure mode with the BSE detector.

    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.
    Stainless steel fracture surface, imaged with secondary electrons in high vacuum.

  • Electronics

    Semiconductors & Electronics

    • Visual inspection of electronic components, integrated circuits, MEMS devices and solar cells
    • Copper wire surface and crystal structure investigation
    • Metal corrosion investigations
    • Cross-sectional failure analysis
    • Bonding foot inspections
    • Capacitor surface imaging
    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.
    Wire bond inspection using secondary electron imaging in high vacuum or variable pressure mode.

    Corroded Nickel layer imaged with secondary electrons

    Corroded Nickel layer imaged with secondary electrons

    Corroded Nickel layer imaged with secondary electrons
    Corroded Nickel layer imaged with secondary electrons

    SE image revealing whisker growth on an electronic device.

    SE image revealing whisker growth on an electronic device.

    SE image revealing whisker growth on an electronic device.
    SE image revealing whisker growth on an electronic device.

  • Steel and other Metals

    Steel and other Metals

    • Imaging and analysis of the structure, chemistry and crystallography of metallic samples and inclusions
    • Phase, particle, weld and failure analysis
    Cross section of galvanised mild steel, imaged using the SE detector on EVO 15.

    Cross section of galvanised mild steel, imaged using the SE detector on EVO 15.

    Cross section of galvanised mild steel, imaged using the SE detector on EVO 15.
    Cross section of galvanised mild steel, imaged using the SE detector on EVO 15.
    Left: mounting resin; middle: zinc layer; right: mild steel.

    Surface of S355 steel after grit blasting with F80 grit alumina.

    Surface of S355 steel after grit blasting with F80 grit alumina.

    Surface of S355 steel after grit blasting with F80 grit alumina.
    Surface of S355 steel after grit blasting with F80 grit alumina.
    Imaged with the BSE detector on EVO 15. Sample: courtesy of TWI Ltd, UK

    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.

    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.
    Surface of titanium alloy (Ti-6Al-4V) additively manufactured using selective laser melting showing fully melted regions alongside unmelted Ti-6Al-4V particles and other material.
    Imaged with BSE detector on ZEISS EVO 15. Sample provided by TWI Ltd.

  • Raw Materials

    Raw Materials

    • Morphology, mineralogy and compositional analysis of geological samples
    • Imaging and analysis of the structure of metals, fractures, and nonmetallic inclusions
    • Morphological and compositional analysis of raw chemicals and active ingredients during micronization and granulation processes
    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen

    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen

    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen
    Mineralogic mineral map of blueschist. Sample: courtesy of S. Owen

    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK

    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK

    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK
    Residual copper slag particle from large Zambian copper smelter. Sample: courtesy of Petrolab, UK

    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.
    Peralkaline Granite, Northern Quebec, Canada, containing rare earth elements, including a fluorite vein that crosscuts the sample and zoned zircons.

  • Materials Science

    Materials Science Research

    • Characterization of both conductive and non-conductive material samples for research purposes
    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.

    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.

    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.
    Expansion and crack bridging network of self-healing minerals, imaged using SE detector at 12 kV shows flower-like hydro-magnesite structures is formed.

    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.

    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.

    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.
    Graphene foam structure from a battery assembly, imaged in high vacuum with SE detector.

    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.
    Aerospace composite material imaged with the C2D detector at 10 kV in Variable Pressure mode.

  • Life Sciences

    Life Sciences

    • Research into plants, animals and micro-organisms
    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.

    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.

    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.
    False-colored image of mildew on the surface of a leaf. Imaged with C2DX detector at 570 Pa water vapor at 1°C, 20 kV.

    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.

    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.

    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.
    Detail of a pseudoscorpion, imaged with BSE detector under high vacuum at 20 kV.

    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.
    Tree pollen imaged with extended pressure and C2DX detector at near to 100% relative humidity.

  • Forensics

    Forensics

    • Gunshot residue (GSR)
    • Paint and glass analysis
    • Bank note and coin forgery
    • Hair and fiber comparisons
    • Forensic toxicology
    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.

    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.

    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.
    Molten glass solidified on a tungsten fragment indicate the bulb was active at the time of the incident.
    Imaged with the C2D detector at 20 kV, 30 Pa.

    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.

    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.

    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.
    The C2D detector produces excellent images of uncoated samples in variable pressure mode, perfectly suited to forensic fiber comparisons.

    The mark from a firing pin on a gun casing can be used to help identify the weapon used.

    The mark from a firing pin on a gun casing can be used to help identify the weapon used.

    The mark from a firing pin on a gun casing can be used to help identify the weapon used.
    The mark from a firing pin on a gun casing can be used to help identify the weapon used.
    Imaged with the SE detector at 10 kV.


Downloads

ZEISS EVO

Your Modular SEM Platform for Intuitive Operation, Routine Investigations and Research Applications

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White Paper: Beam Deceleration Imaging with ZEISS EVO

Receive high quality images with enhanced surface contrast and topographical detail for low kV imaging and life science samples

Pages: 6
Filesize: 845 kB

White Paper: Python Blood Analysis by STEM

Pages: 7
Filesize: 5,371 kB

White Paper: Coolstage benefits on ZEISS EVO

Pages: 6
Filesize: 5,021 kB

White Paper: Imaging Solutions for the Paper Technology Industry

Pages: 7
Filesize: 3,915 kB

White Paper: ZEISS EVO - Fisheye OptiBeam Mode

Use the largest field of view yet devised for SEM for easy navigation across large specimens

Pages: 6
Filesize: 591 kB

Application Note: Enhancing Material Inspection and Characterization Information and Data Integrity

By Combining Light and Scanning Electron Microscopy in a Correlative Workflow

Pages: 8
Filesize: 1,456 kB

Concrete Crack Self-healing Materials Micro Structure Investigation

Pages: 5
Filesize: 1,975 kB

Application Note: Forensic Paint Analysis

Pages: 4
Filesize: 952 kB

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