With the advent of faster and more sensitive EBSD cameras and high beam current scanning electron microscopes (SEM), the actual EBSD acquisition is no longer the time-limiting factor for studies of grain structure or internal strain. It is now the sample preparation, which is typically done by vibratory polishing or in-situ focused ion beam (FIB) polishing. Both methods have their limitations when it comes to either site-specificity or preparation of large regions of interest.

In this webinar we present a solution to overcome these limitations using the ZEISS LaserFIB. A LaserFIB is the combination of a FIB-SEM with a femtosecond laser system for fast material ablation. The use of the laser facilitates extremely fast sample machining and surface preparation. Together with the high-resolution imaging and post-polishing capabilities of the FIB-SEM, this enables rapid and precise relocation and preparation of specific regions of interest for EBSD analysis.

We show several real-world examples of metal surfaces suitable for EBSD grain mapping, rapidly prepared using the LaserFIB. The total preparation time for e.g. a 300 x 200 µm large EBSD-suitable region of interest can be as short as 5 minutes. FIB post-polishing can be readily applied in-situ. However, you will see that the surface quality of the just laser polished cross-sections is sufficient for decent EBSD experiments.

Key Learnings:

• Explore the technical details of the LaserFIB as the combination of a FIB-SEM with a femtosecond laser system for fast material ablation
• Learn how the LaserFIB can be used to rapidly prepare large regions of interest for EBSD analysis
• See for yourself the surface quality of just laser polished cross-sections which is sufficient to generate a decent EBSD signal without the need for FIB post-polishing