Press Release

Sale of ZEISS iTrap

Agreement between ZEISS and Atlas Copco. First Transfer of a Portfolio Element of ZEISS Ventures

AUG 04, 2020 · 2 min read
Press Contact

Jörg Nitschke

Group Spokesman

OBERKOCHEN, Germany / NACKA, Schweden |   ZEISS Semiconductor Manufacturing Technology

Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS. The business will become part of the Semiconductor Chamber Solutions Division in Atlas Copco‘s Business Area Vacuum Technique.

ZEISS has developed the ion trap mass spectrometer iTrap, a technology for highly sensitive, real time gas analysis. The technology is used for process analytics and advanced process control in the semiconductor market. iTrap can analyze and control important chemical processes in vacuum chambers of semiconductor manufacturing equipment and other applications. That is the first external sale of a ZEISS venture. The innovation will benefit from better market synergies that are available outside of ZEISS.

  • An employee of ZEISS works on the SMT technologies in a cleaning room
    ZEISS

    Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS.

Atlas Copco will integrate iTrap in the Edwards business to synergize with other vacuum technology solutions of the worldwide market leader. At Edwards the technology will benefit from a worldwide sales and service network as well as from innovation and application centers close to all relevant major customer sites worldwide.

The asset deal comprises the sale of the technology including intellectual properties and the transfer of key employees. Both parties have agreed not to disclose the purchase price or other details of the agreement. Completion of the transaction was on 3 August 2020.

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