Press Release

Sale of ZEISS iTrap

Agreement between ZEISS and Atlas Copco. First Transfer of a Portfolio Element of ZEISS Ventures

4 August 2020 · 2 min read

Oberkochen, Germany / Nacka, Schweden | 4 August 2020 | ZEISS Semiconductor Manufacturing Technology

Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS. The business will become part of the Semiconductor Chamber Solutions Division in Atlas Copco‘s Business Area Vacuum Technique.

ZEISS has developed the ion trap mass spectrometer iTrap, a technology for highly sensitive, real time gas analysis. The technology is used for process analytics and advanced process control in the semiconductor market. iTrap can analyze and control important chemical processes in vacuum chambers of semiconductor manufacturing equipment and other applications. That is the first external sale of a ZEISS venture. The innovation will benefit from better market synergies that are available outside of ZEISS.

  • An employee of ZEISS works on the SMT technologies in a cleaning room

    Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS.

Atlas Copco will integrate iTrap in the Edwards business to synergize with other vacuum technology solutions of the worldwide market leader. At Edwards the technology will benefit from a worldwide sales and service network as well as from innovation and application centers close to all relevant major customer sites worldwide.

The asset deal comprises the sale of the technology including intellectual properties and the transfer of key employees. Both parties have agreed not to disclose the purchase price or other details of the agreement. Completion of the transaction was on 3 August 2020.

Press Contact Jörg Nitschke Group Spokesman


ZEISS is an internationally leading technology enterprise operating in the fields of optics and optoelectronics. In the previous fiscal year, the ZEISS Group generated annual revenue totaling more than 6.4 billion euros in its four segments Semiconductor Manufacturing Technology, Industrial Quality & Research, Medical Technology and Consumer Markets (status: 30 September 2019).

For its customers, ZEISS develops, produces and distributes highly innovative solutions for industrial metrology and quality assurance, microscopy solutions for the life sciences and materials research, and medical technology solutions for diagnostics and treatment in ophthalmology and microsurgery. The name ZEISS is also synonymous with the world's leading lithography optics, which are used by the chip industry to manufacture semiconductor components. There is global demand for trendsetting ZEISS brand products such as eyeglass lenses, camera lenses and binoculars.

With a portfolio aligned with future growth areas like digitalization, healthcare and Smart Production and a strong brand, ZEISS is shaping the future of technology and constantly advancing the world of optics and related fields with its solutions. The company's significant, sustainable investments in research and development lay the foundation for the success and continued expansion of ZEISS' technology and market leadership.

With over 31,000 employees, ZEISS is active globally in almost 50 countries with around 60 sales and service companies, 30 production sites and 25 development sites. Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany. The Carl Zeiss Foundation, one of the largest foundations in Germany committed to the promotion of science, is the sole owner of the holding company, Carl Zeiss AG.

Semiconductor Manufacturing Technology

With its product portfolio and expertise, the Semiconductor Manufacturing Technology segment of ZEISS covers a variety of key processes in the production of microchips. Its products include semiconductor manufacturing optics – notably lithography optics – as well as photomask systems and process control solutions for semiconductor manufacturing. Thanks to ZEISS technology, microchips are becoming increasingly smaller, more powerful, more energy-efficient and more affordable. The electronic applications of these ongoing enhancements enable global progress in many disciplines such as technology, electronics, communication, entertainment, mobility and energy. Semiconductor Manufacturing Technology is headquartered in Oberkochen. Other sites include Jena, Rossdorf and Wetzlar in Germany, as well as Bar Lev (Israel) and Pleasanton, CA and Peabody, MA (USA).

Press Photos

  • Sale of ZEISS iTrap

    Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS.

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