Ministry supports EUV.
BMBF Joint Project for New Chip Fabrication Technology – Key Milestone Successfully Achieved
PROVE™ Final Acceptance.
Carl Zeiss System PROVE™ passed Final Acceptance at NuFlare Technology
RegC™ Product Launch.
Carl Zeiss launched a new system for photomask registration correction
R&D contract.
Carl Zeiss Receives R&D Contract for Its Gas Field Ion Source (GFIS) Technology
