Field Emission Scanning Electron Microscope

ZEISS Sigma Family

Your ZEISS SIGMA FE-SEMs for High Quality Imaging and Advanced Analytical Microscopy

ZEISS Sigma 300 delivers excellence in price and performance. Achieve your elemental analysis fast and convenient with the best-in-class EDS geometry of ZEISS Sigma 500. Count on accurate, reproducible results – from any sample, every time.

Flexible Detection. 4-Step Workflow. Advanced Analytics.

Combine field emission SEM (FE-SEM) technology with advanced analytics. Profit from proven Gemini electron optics. Choose from a variety of detector options: you can image particles, surfaces, and nanostructures. Save time with the semi-automated 4-step workflow of Sigma: structure your imaging and analysis routines and increase productivity.


Fibers, used in antimicrobial dressings in wound care.

Flexible Detection for Clear Images

  • Tailor Sigma to your needs using the latest detection technology and characterize all of your samples.
  • Acquire topographical and compositional information with the optional InLens Duo detector.
  • Enjoy a new generation of secondary electron (SE) detectors. Obtain images with up to 50% more signal. Benefit from the novel C2D and VPSE detectors of Sigma in variable pressure mode: working at low vacuum, you can expect crisp images with up to 85% more contrast.
Save time with Sigma’s 4-step workflow.

Automate and Speed up Your Workflow

  • A 4-step workflow lets you control all the functionality of your Sigma. Benefit from fast time-to-image and save time on training - especially in a multi-user environment.
  • First, navigate your sample and then set optimal imaging conditions.
  • Next, automatically acquire images across multiple samples utilizing regions of interest (ROIs). Finally use the workflow’s last step for contextual visualization of your results.
Speed up X-ray analyses with best-in-class EDS geometry.

Perform Advanced Analytical Microscopy

  • Combine scanning electron microscopy and elemental analytics: the best-in-class EDS geometry of Sigma increases your analytical productivity, especially on beam sensitive samples.
  • Get analytical data at half the probe current and twice the speed.
  • Achieve complete, shadow-free analytics in your FE-SEM. Profit from using a short analytical working distance of 8.5 mm and a take-off angle of 35°.


Based on Proven Gemini Technology

  • The Gemini objective lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials.
  • The Gemini in-lens detection concept ensures efficient signal detection by detecting secondary (SE) and/or backscattered (BSE) electrons minimizing time-to-image.
  • Gemini beam booster technology guarantees small probe sizes and high signal-to-noise ratios.

Flexible Detection for Clear Images

  • Characterize all of your samples with the latest detection technology.
  • Get topographical, high resolution information with the novel ETSE and the Inlens detector for high vacuum mode.
  • Obtain crisp images in variable pressure mode with the VPSE or the C2D detector.
  • Produce high resolution transmission images with the aSTEM detector.
  • Investigate composition with the HDBSD or the YAG detector.


Microlens array of a CCD sensor
Microlens array of a CCD sensor, imaged with ETSE.
Nickel sulphide ore
Nickel sulphide ore. Mineralogic map generated from a backscatter image and an EDS map.
Lanthanum carbonate
Lanthanum carbonate, imaged at 1 kV at high vacuum with Inlens Duo BSE.
Ni-Cr-Fe metal spray powder coating
Ni-Cr-Fe metal spray powder coating imaged at 4 kV with HDBSD.



Discover Embedded Energy Dispersive X-ray Spectroscopy Analysis

If SEM imaging alone isn’t enough to gain a complete understanding of your samples turn to embedded EDS for microanalysis in the SEM. Acquire spatially resolved elemental chemistry information with a solution optimized for low voltage applications.
  • Optimization for routine microanalysis applications and detection of low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window
  • Workflow-guided graphical user interface improves ease-of-use and repeatability in multi-user environments
  • Total service and system support by a ZEISS engineer is giving you a one-stop-shop for installation, preventive maintenance and warranty

Raman Imaging and Scanning Electron Microscopy

Reap the Benefits of Fully Integrated RISE

Raman Imaging and Scanning Electron Microscopy
Complement the characterization of your material and add Raman Spectroscopic Imaging. Get a chemical fingerprint from your sample and extend your ZEISS Sigma 300 with confocal Raman imaging capability.
  • Recognize molecular and crystallographic information
  • Perform 3D analysis and correlate SEM imaging, with Raman mapping and EDS data if appropriate
  • Fully integrated RISE lets you take advantage of both best-in-class SEM and Raman systems


SmartSEM Touch

ZEISS SmartSEM Touch - Get more Hands on Deck

SmartSEM Touch, an add-on to the established operation system, is a simplified user-interface for multi-user environments. It comes with easy operation for both experienced and novice users. Depending on the actual laboratory environment, operation of the SEM can be the exclusive domain of expert electron microscopists. But this situation is challenged by the very common necessity that non-expert users, such as students, trainees, or quality engineers, also require data from the SEM. Sigma 300 and Sigma 300 VP take both requirements into account, with user interface options that cater to the operational needs of experienced microscopists as well as non-microscopists.

Atlas 5

ZEISS Atlas 5 – Master Your Multi-scale Challenge

Atlas 5 makes your life easier: create comprehensive multi-scale, multi-modal images with a sample-centric correlative environment. Atlas 5 is the powerful yet intuitive hardware and software package that extends the capacity of your scanning electron microscope.

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Lithium-ion Battery
Lithium-ion Battery

Visualization and Analysis Software

ZEISS recommends Dragonfly Pro from Object Research Systems (ORS)
An advanced analysis and visualization software solution for your 3D data acquired by a variety of technologies including X-ray, FIB-SEM, SEM and helium ion microscopy.

Available exclusively through ZEISS, ORS Dragonfly Pro offers an intuitive, complete, and customizable toolkit for visualization and analysis of large 3D grayscale data. Dragonfly Pro allows for navigation, annotation, creation of media files, including video production, of your 3D data. Perform image processing, segmentation, and object analysis to quantify your results.

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ZEISS Sigma 300 with RISE

Extend your ZEISS Sigma 300 with Fully Integrated Raman Imaging and Scanning Electron Microscopy (RISE)

pages: 2
file size: 2075 kB

ZEISS Sigma Family

Your Field Emission SEMs for High Quality Imaging and Advanced Analytical Microscopy

pages: 33
file size: 8428 kB


The ZEISS Embedded EDS Solution for Your Routine SEM Microanalysis Applications

pages: 10
file size: 2160 kB

ZEISS ORS Dragonfly

Outstanding 3D visualization with best-in-class graphics

pages: 2
file size: 561 kB

ZEISS Sigma Family - Flyer

Your FE-SEMs for High Quality Imaging & Advanced Analytical Microscopy

pages: 2
file size: 2146 kB

ZEISS Sigma 300 with WITec Confocal Raman Imaging

Characterizing Structural and Electronic Properties of 2D Materials Using RISE Correlative Microscopy

pages: 10
file size: 6581 kB

Correlative Automated Quantitative Mineralogy (AQM) and LA-ICP-MS Workflows

for Geochronology, Vector/Indicator Minerals and Conflict Minerals

pages: 6
file size: 1704 kB

Application Note:

Cathodoluminescence of Geological Samples: Fluorite Veins

pages: 5
file size: 5476 kB

White Paper: ZEISS Sigma 300

Quantitative EBSD Studies of Soft Magnetic Composites

pages: 8
file size: 10255 kB

3D Imaging Systems

Your Guide to the Widest Selection of Optical Sectioning, Electron Microscopy and X-ray Microscopy Techniques.

pages: 68
file size: 5952 kB

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