ZEISS Sigma​
Product

ZEISS Sigma​ FE-SEM for High-Quality Imaging & Advanced Analytical Microscopy

The ZEISS Sigma family combines field emission scanning electronic microscope (FE-SEM) technology with an excellent user experience. Structure your imaging and analysis routines and increase productivity. Choose from a suite of detector options. Enter the world of high-end imaging: Sigma 300 delivers excellence in price and performance while Sigma 500’s best-in-class EDS geometry offers superb analytical performance.

  • Flexible detection for clear images
  • Automate and speed up your workflow
  • Perform advanced analytical microscopy

Flexible Detection. 4-Step Workflow. Advanced Analytics.

Mineral ore, lanthanum carbonate phosphate binder. Sigma 500, 1 kV, Inlens Duo BSE detector left.​
Mineral ore, lanthanum carbonate phosphate binder. Sigma 500, 1 kV, Inlens SE right.​

Flexible Detection for Clear Images

  • Tailor Sigma to your needs using the latest detection technology and characterize all of your samples.
  • Characterize composition, crystallography and surface topography with the annular backscatter detector (aBSD). It delivers excellent low kV images under all vacuum conditions. Benefit from improved sensitivity, increased signal-to-noise ratio, and more speed.
  • Enjoy a new generation of secondary electron (SE) detectors. Benefit from the C2D and VPSE detectors of Sigma in variable pressure mode: working at low vacuum, you can expect crisp images with up to 85% more contrast.

Mineral ore, lanthanum carbonate phosphate binder. Sigma 500, 1 kV, Inlens Duo BSE detector left, Inlens SE right.​

SmartSEM Touch - Automate and Speed Up Your Workflow​

Automate and Speed Up Your Workflow​

  • Control the functionality of your Sigma with a 4-step workflow. Benefit from fast time-to-image and save time on training - especially in a multi-user environment.​
  • First, navigate your sample, then set optimal imaging conditions. Next, automatically acquire images across multiple samples and visualize your results in context.​
  • SmartSEM Touch presents your data as an interactive map so you can understand your sample completely.
Perform Advanced Analytical Microscopy​

Perform Advanced Analytical Microscopy​

  • Combine scanning electron microscopy and elemental analytics: the best-in-class EDS geometry of Sigma increases your analytical productivity, especially on beam sensitive samples.​
  • Get analytical data at half the probe current and twice the speed.​
  • Achieve complete, shadow-free analytics in your FE-SEM. Profit from using a short analytical working distance of 8.5 mm and a take-off angle of 35°.

Technology

Schematic cross-section of Gemini optical column with beam booster, Inlens detector and Gemini objective.

Schematic cross-section of Gemini optical column with beam booster, Inlens detector and Gemini objective.

Schematic cross-section of Gemini optical column with beam booster, Inlens detector and Gemini objective.

Gemini Optics

Gemini optics consists of three elements: objective lens, beam booster, and Inlens detection concept. The objective lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials. The Inlens detection concept ensures efficient signal detection by detecting secondary (SE) and/or backscattered (BSE) electrons while minimizing time-to-image. The beam booster guarantees small probe sizes and high signal-to-noise ratios.

Gemini 1 column of Sigma with detectors. 1 Inlens detectors, SE or Duo. 2 ETSE detector, 3 VPSE, 4 C2D, 5 aSTEM, 6 / 7 Advanced EDS detection, 8 AsB, HDBSD, YAG or aBSD detector.

Schematic cross-section of Gemini 1 optical column with detectors.

Gemini 1 column of Sigma with detectors. 1 Inlens detectors, SE or Duo. 2 ETSE detector, 3 VPSE, 4 C2D, 5 aSTEM, 6 / 7 Advanced EDS detection, 8 AsB, HDBSD, YAG or aBSD detector.

Gemini 1 column of Sigma with detectors. 1 Inlens detectors, SE or Duo. 2 ETSE detector, 3 VPSE, 4 C2D, 5 aSTEM, 6 / 7 Advanced EDS detection, 8 AsB, HDBSD, YAG or aBSD detector.

Schematic cross-section of Gemini 1 optical column with detectors.

Flexible Detection

Sigma features a suite of different detectors. Characterize your samples with the latest detection technology. Get topographical, high resolution information with the ETSE and the Inlens detector for high vacuum mode. Obtain crisp images in variable pressure mode with the VPSE or the C2D detector. Produce high resolution transmission images with the aSTEM detector. Investigate composition and topography with the aBSD detector.

 

Applications

  • CCD Microlens acquired with Sigma 500, ETSE detector, Everhart-Thornley Secondary Electron
  • Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm.
  • Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.
  • Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.
  • CVD-grown MoS2 2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.
  • Polymer mixture of polystyrene (PS) and polymethyl methacrylate (PMMA): These two polymers form an immiscible blend. The domain structures are clearly imaged where PS is blue and PMMA is red, image width 288 µm.
  • CCD Microlens acquired with Sigma 500, ETSE detector, Everhart-Thornley Secondary Electron
    CCD Microlens acquired with Sigma 500, ETSE detector, Everhart-Thornley Secondary Electron

    Reveal high surface detail in surface defect inspection of non-conductive microlenses, even at 300 V, with the ETSE detector.

    Reveal high surface detail in surface defect inspection of non-conductive microlenses, even at 300 V, with the ETSE detector.

  • Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm.
    Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm.

    Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm.

    Fibers with embedded silver nanoparticles, from antimicrobial dressings in wound care. 1 kV, left: Inlens Duo SE, right: Inlens Duo BSE, image width 90 µm.

  • Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.
    Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.

    Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.

    Lanthanum carbonate is a phosphate binder used as an oral therapeutic agent for dialysis patients, imaged at 1 kV with Inlens Duo BSE.

  • Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.
    Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.

    Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.

    Platinum grains showing grain boundary slip planes, imaged at 4 kV with AsB detector, image width 69 µm.

  • CVD-grown MoS2 2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.

    CVD-grown MoS2 2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.

    CVD-grown MoS2D crystals on Si/SiO2 substrate: The RISE image demonstrates wrinkles and overlapping parts of the MoS2 crystals (green), multilayers (blue) and single layers (red), image width 32 µm.

  • Polymer mixture of polystyrene (PS) and polymethyl methacrylate (PMMA): These two polymers form an immiscible blend. The domain structures are clearly imaged where PS is blue and PMMA is red, image width 288 µm.

    Polymer mixture of polystyrene (PS) and polymethyl methacrylate (PMMA): These two polymers form an immiscible blend. The domain structures are clearly imaged where PS is blue and PMMA is red, image width 288 µm.

    Polymer mixture of polystyrene (PS) and polymethyl methacrylate (PMMA): These two polymers form an immiscible blend. The domain structures are clearly imaged where PS is blue and PMMA is red, image width 288 µm.

Materials Science

Discover images of materials samples such as polymers, fibers, molybdenum sulfide and more.

  • The delicate open structure of a radiolarian is imaged effortlessly by the ETSE detector at 1 kV under high vacuum , image width 183 µm.
  • Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.
  • Pearl surface: This RISE image overlaid on a SEM image makes it possible to differentiate between aragonite and vaterite phases, image width 154 µm . Both are CaCO3 polymorphs that are present in milky pearls.
  • Aragonite (blue) and vaterite (red) can be clearly differentiated by means of Raman spectra.
  • The delicate open structure of a radiolarian is imaged effortlessly by the ETSE detector at 1 kV under high vacuum , image width 183 µm.

    The delicate open structure of a radiolarian is imaged effortlessly by the ETSE detector at 1 kV under high vacuum , image width 183 µm.

    The delicate open structure of a radiolarian is imaged effortlessly by the ETSE detector at 1 kV under high vacuum , image width 183 µm.

  • Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.
    Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.

    Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.

    Mushroom spores imaged at 1 kV at high vacuum. These delicate, fragile structures can be imaged easily with Sigma 500 at low voltage.

  • Pearl surface: This RISE image overlaid on a SEM image makes it possible to differentiate between aragonite and vaterite phases, image width 154 µm . Both are CaCO3 polymorphs that are present in milky pearls.
    Pearl surface: This RISE image overlaid on a SEM image makes it possible to differentiate between aragonite and vaterite phases, image width 154 µm . Both are CaCO3 polymorphs that are present in milky pearls.

    Pearl surface: This RISE image makes it possible to differentiate between aragonite and vaterite phases. Both are calcium carbonate polymorphs that are present in milky pearls. Image width 154 µm.

    Pearl surface: This RISE image makes it possible to differentiate between aragonite and vaterite phases. Both are calcium carbonate polymorphs that are present in milky pearls. Image width 154 µm.

  • Aragonite (blue) and vaterite (red) can be clearly differentiated by means of Raman spectra.
    Aragonite (blue) and vaterite (red) can be clearly differentiated by means of Raman spectra.

    Pearl surface, Raman spectra: Aragonite (blue) and vaterite (red) have the same chemical compositions, but different crystal structures and can be clearly differentiated with RISE.

    Pearl surface, Raman spectra: Aragonite (blue) and vaterite (red) have the same chemical compositions, but different crystal structures and can be clearly differentiated with RISE.

Life Sciences

Learn more about of the micro- and nanostructure of protozoans, fungi and how to apply Raman to pearls.

  • Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.
  • Nickel sulphide ore. Mineralogic mineral EDS map, image width 3.1 mm. Sample: courtesy of the University of Leicester, UK.
  • Iron Mineralogy: Raman identification of iron ore mineral, SEM image and Raman maps overlaid. (Hematite is red, blue, green, orange and pink; goethite is light blue).
  • Iron Mineralogy, Raman spectra: Differences in the spectra of hematite are attributed to the different orientations of the crystals. (Hematite is red, blue, green, orange and pink; goethite is light blue).
  • Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.
    Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.

    Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.

    Rock sample imaged with the YAG-BSD which delivers images at high speeds due to the performance in light conducting of the YAG crystal, imaged at 20 kV.

  • Nickel sulphide ore. Mineralogic mineral EDS map, image width 3.1 mm. Sample: courtesy of the University of Leicester, UK.
    Nickel sulphide ore. Mineralogic mineral EDS map, image width 3.1 mm. Sample: courtesy of the University of Leicester, UK.

    Nickel sulphide ore. Mineralogic mineral EDS map, image width 3.1 mm. Sample: courtesy of the University of Leicester, UK.

    Nickel sulphide ore. Mineralogic mineral EDS map, image width 3.1 mm. Sample: courtesy of the University of Leicester, UK.

  • Iron Mineralogy: Raman identification of iron ore mineral, SEM image and Raman maps overlaid. (Hematite is red, blue, green, orange and pink; goethite is light blue).
    Iron Mineralogy: Raman identification of iron ore mineral, SEM image and Raman maps overlaid. (Hematite is red, blue, green, orange and pink; goethite is light blue).

    Iron Mineralogy: Raman identification of iron ore mineral, SEM image and Raman maps overlaid. (Hematite is red, blue, green, orange and pink; goethite is light blue).

    Iron Mineralogy: Raman identification of iron ore mineral, SEM image and Raman maps overlaid. (Hematite is red, blue, green, orange and pink; goethite is light blue).

  • Iron Mineralogy, Raman spectra: Differences in the spectra of hematite are attributed to the different orientations of the crystals. (Hematite is red, blue, green, orange and pink; goethite is light blue).
    Iron Mineralogy, Raman spectra: Differences in the spectra of hematite are attributed to the different orientations of the crystals. (Hematite is red, blue, green, orange and pink; goethite is light blue).

    Iron Mineralogy, Raman spectra: Differences in the spectra of hematite are attributed to the different orientations of the crystals. (Hematite is red, blue, green, orange and pink; goethite is light blue).

    Iron Mineralogy, Raman spectra: Differences in the spectra of hematite are attributed to the different orientations of the crystals. (Hematite is red, blue, green, orange and pink; goethite is light blue).

Geosciences and Natural Resources

Explore rocks, ores and metals.

  • Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D.
  • 25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.
  • Superconductor alloy sample imaged at 1 kV with the aBSD.
  • Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D.
    Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D.

    Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D, image width 10 µm.

    Non-conductive titanium dioxide nanoparticles used as pigments and opacifying agents can be imaged easily at 40 Pa in VP mode with the C2D, image width 10 µm.

  • 25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.
    25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.

    25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.

    25 – 50 nm iron oxide particles imaged with the aSTEM detector in darkfield mode at 20 kV.

  • Superconductor alloy sample imaged at 1 kV with the aBSD.
    Superconductor alloy sample imaged at 1 kV with the aBSD.

    Superconductor alloy sample imaged at 1 kV with the aBSD. (Scalebar 20 µm)

    Superconductor alloy sample imaged at 1 kV with the aBSD. (Scalebar 20 µm)

Industrial Applications

See how metals, alloys and powders are investigated.

Accessories

In Situ Lab for ZEISS FE-SEMs - Link Materials Performance to Microstructure

In Situ Lab for ZEISS FE-SEMs

Link Materials Performance to Microstructure

Extend your ZEISS FE-SEM with an in situ solution for heating and tensile experiments. Benefit from an integrated solution. Investigate materials like metals, alloys, polymers, plastics, composites, and ceramics. Combine a mechanical tensile or compression stage, a heating unit and dedicated high-temperature detectors with analytics. Control all system components from a single PC with a unified software environment that enables unattended automated materials testing.

SmartEDX - Discover Embedded Energy Dispersive X-ray Spectroscopy

SmartEDX

Discover Embedded Energy Dispersive X-ray Spectroscopy

If SEM imaging alone isn’t enough to gain a complete understanding of your samples turn to embedded EDS for microanalysis. Acquire spatially resolved elemental information with a solution optimized for low voltage applications. Optimize routine microanalysis and detection of low energy X-rays from light elements thanks to superior transmissivity of the silicon nitride window. Teams in multi-user environments will benefit from the workflow-guided GUI. The support of the ZEISS engineer offers you a one-stop-shop for installation, preventive maintenance and warranty.
Fully Integrated RISE - Benefit from Raman Imaging and Scanning Electron Microscopy

Fully Integrated RISE

Benefit from Raman Imaging and Scanning Electron Microscopy

Complement the characterization of your material and add Raman Spectroscopic Imaging (RISE). Get a chemical fingerprint from your sample and extend your Sigma 300 with confocal Raman imaging capability. Recognize molecular and crystallographic information. Perform 3D analysis and correlate SEM imaging, with Raman mapping and EDS data if appropriate. Fully integrated RISE lets you take advantage of both best-in-class SEM and Raman systems.

Downloads

    • 3D Imaging Systems

      Your Guide to the Widest Selection of Optical Sectioning, Electron Microscopy and X-ray Microscopy Techniques.

      Pages: 68
      File size: 5 MB
    • ZEISS Sense BSD

      Backscatter Electron Detector for Fast and Gentle Ultrastructural Imaging

      Pages: 6
      File size: 6 MB
    • ZEISS Sigma 300 with RISE

      Extend your ZEISS Sigma 300 with Fully Integrated Raman Imaging and Scanning Electron Microscopy (RISE)

      Pages: 2
      File size: 2 MB
    • ZEISS Sigma Family

      Your Field Emission SEMs for High Quality Imaging and Advanced Analytical Microscopy

      Pages: 33
      File size: 8 MB
    • ZEISS SmartEDX

      The ZEISS Embedded EDS Solution for Your Routine SEM Microanalysis Applications

      Pages: 10
      File size: 2 MB
    • In Situ Lab for ZEISS FE-SEM (Flyer)

      Pages: 5
      File size: 4 MB
    • ZEISS Sigma Family - Flyer

      Your FE-SEMs for High Quality Imaging & Advanced Analytical Microscopy

      Pages: 2
      File size: 2 MB
    • Large Volume Imaging of Eye Muscle by SIGMA VP and 3View

      Serial Block Face Imaging

      Pages: 8
      File size: 1 MB
    • ZEISS Sigma 300 with WITec Confocal Raman Imaging

      Characterizing Structural and Electronic Properties of 2D Materials Using RISE Correlative Microscopy

      Pages: 10
      File size: 6 MB
    • Correlative Automated Quantitative Mineralogy (AQM) and LA-ICP-MS Workflows

      for Geochronology, Vector/Indicator Minerals and Conflict Minerals

      Pages: 6
      File size: 1 MB
    • Voltage Contrast in Microelectronic Engineering

      Pages: 6
      File size: 1 MB
    • Case Study

      Corrosion analysis of modern and historic railway trackwith optical, electron and correlative Raman microscopy

      Pages: 10
      File size: 7 MB
    • Cathodoluminescence of Geological Samples: Fluorite Veins

      ZEISS Scanning Electron Microscopes with Atlas

      Pages: 5
      File size: 5 MB
    • Investigating Sweet Spot Imaging of Perovskite Catalysts Bearing Exsolved Active Nanoparticles

      Pages: 6
      File size: 5 MB
    • ZEISS Sigma 300

      Quantitative EBSD Studies of Soft Magnetic Composites

      Pages: 8
      File size: 10 MB
    • ZEISS Focal CC

      Instruction Manual (English)

      Pages: 34
      File size: 5 MB
    • ZEISS SmartSEM v7.00 Sigma

      Software Manual (English)

      Pages: 272
      File size: 9 MB
    • Famiglia ZEISS Sigma

      Il microscopio elettronico a scansione (SEM) a emissione di campo per un imaging di alta qualità e una microscopia analitica avanzata

      Pages: 33
      File size: 3 MB
    • ZEISS Sigma Ailesi

      Yüksek kaliteli görüntüleme ve gelişmiş analitik mikroskopi çalışmaları için alan emisyonlu taramalı elektron mikroskopları (SEM)

      Pages: 33
      File size: 1 MB

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