ZEISS GeminiSEM

Field Emission Scanning Electron Microscope

The GeminiSEM Family

For Your Highest Demands in Sub-nanometer Imaging, Analytics and Sample Flexibility

ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. Use it for your most demanding projects in materials and life science. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. Combine excellence in imaging and analytics. Take sub-nanometer images below 1 kV without an immersion lens. Discover three unique designs of the Gemini electron optics. Explore, how the GeminiSEM family answers all your imaging and analytical needs.

$Characterize nanometer-scaled features at the fractured surface of the non-conducting mineral montmorillonite$

Characterize nanometer-scaled features at the fractured surface of the non-conducting mineral montmorillonite.

Ideal for core facilities - ZEISS GeminiSEM 360 with its Gemini 1 electron optical column delivers high resolution imaging and analytics over the widest range of applications and sample types.
Enabling efficient analysis - ZEISS GeminiSEM 460 and its Gemini 2 column serve the most challenging tasks in analytical microscopy. Switch seamlessly between imaging and analytical conditions over a wide range of probe currents.
The new standard for surface imaging – introducing ZEISS GeminiSEM 560, Gemini 3, and its new electron optical engine Smart Autopilot. It delivers the highest resolution in the family at all working conditions.

Highlights

The Family
Explore all details about the three models and find out which is most suited for your applications.

ZEISS GeminiSEM 360

The ideal instrument for a core facility, delivering maximum versatility for materials science, life sciences, and industry.

Leverage comprehensive sample characterization with two unique Inlens detectors configured in parallel.

Configure your instrument tailored to your needs thanks to the versatile chamber.

Perform multimodal experiments with ZEN Connect and understand your specimens completely.

Your Tool for Sample Flexibility

GeminiSEM 360 is the ideal instrument for a core facility, delivering maximum versatility for materials & life science, and industry.
The eponymous electron optical design Gemini 1 design brings you the benefit of surface sensitive, high resolution images providing excellent resolution at low voltage and great speed at high probe current.
Gather high resolution, surface- and compositional information, even on sensitive samples by using Inlens secondary and backscatter electron imaging simultaneously.
When aiming to image non-conducting samples under lower vacuum, so-called variable pressure, there is no need to forgo Inlens contrast: NanoVP guarantees maximum versatility enabling Inlens imaging without charging.

Unrivalled User Experience

GeminiSEM 360 delivers exceptional user experience: With its wide field of view and new, highly configurable chamber, it’s easy to interrogate even very large samples.
Enjoy seamless navigation with contextual image viewing and correlative microscopy via ZEISS ZEN Connect.
Gain clear, crisp images easily by using autofunctions e.g. the patented autofocus and smart detectors.
Perform both imaging and analytical workflows efficiently with diametrically opposite EDS ports and a coplanar EDS/EBSD geometry.
Maximize system uptime with ZEISS Predictive Service and benefit from scheduled maintenance to take place when you are ready.

Exceptional Capability Extension

Upgradability is essential for protecting your investment. That‘s why GeminiSEM 360 is plugged into the software ecosystem of ZEISS ZEN core.
Draw on ZEN Connect to combine multimodal and multiscale data, ZEN Intellesis for advanced AI- powered segmentation, and ZEN’s analytical modules for reporting and analysis of segmented data. ZEN data storage lets you manage projects centrally by connecting data from different instruments in your lab.
Access workflows and scripts created by other users who can help you solve challenges by being a member of the APEER community.
Improve your system as new capabilities are released thanks to a clear upgrade ability path.

ZEISS GeminiSEM 460

Made for your most exacting analytical tasks and enables efficient analysis and unattended workflows.

Conduct rapid analysis and achieve high current and high resolution simultaneously.

Configure your instrument tailored to your needs thanks to the versatile chamber.

Turn your GeminiSEM 460 into an in situ lab.

Utilize High Resolution and High Current

GeminiSEM 460 is made for your most exacting analytical tasks and enables efficient analysis and unattended workflows.
Perform high-resolution imaging and analytics rapidly: switch seamlessly from low current-low kV work to high current-high kV work, and back again utilizing the Gemini 2 column.
Characterize any specimen comprehensively by using multiple detectors in parallel.
For efficient analysis exploit the versatile chamber and choose appropriate analytical detectors.
Use the new VP mode and turn up the current to obtain EBSD maps with indexing rates of 4000 patterns/s.
Investigate chemical composition and crystal orientation with two diametrically opposite EDS ports and a coplanar EDS/EBSD configuration. Count on high speed, shadow-free mapping.

Customized, Automated Workflows

With such powerful analytics at hand workflow automation becomes key. Create and configure automated experiments of your own with the Python scripting API from ZEISS.
Modify experiments and customize the outcome to your own requirements.
Make the most of STEM tomography: combine automated tilting and rotation with patented feature tracking. Produce 3D tomograms with nanometer-scale resolution after all aligned images are then sent to a proprietary 3D reconstruction software.
When you need to test materials to their engineering limits, ZEISS puts an automated in situ heating and tension experimental lab at your disposal: it lets you observe materials under heat and tension automatically while plotting stress-strain curves on the fly.

Your Pathway to Even More Possibilities

Expand your analytical capabilities across materials and life sciences with exceptionally high, tunable current density, even at low kV - based on the Gemini 2 design.
Take advantage of being able to adapt the system with a wide variety of accessories. The versatile chamber can be configured not only with analytical equipment but also with devices for in situ experiments, cryo-imaging and nanoprobing.
This lets you benefit from the ability to accommodate many configurations and upgrades at any point during the lifetime of your instrument.
All GeminiSEMs are plugged into the ZEISS ZEN core ecosystem giving you access to ZEN Connect, ZEN Intellesis and ZEN’s analytical modules providing reporting and GxP workflows.

ZEISS GeminiSEM 560

Raises the bar for surface-sensitive, distortion-free, high resolution imaging and lets you image below 1 kV easily.

Details on the surface of a non-conducting mineral particle at low kV: GeminiSEM 560 at 800 V, Inlens SE.

3D STEM tomography on a CeO₂ nanoparticle. GeminiSEM 560, aSTEM, bright field, 30 kV.

A sweet spot: Magnetic contrast on a NdFeB magnet

The New Standard in Surface Imaging

GeminiSEM 560 raises the bar for surface-sensitive, distortion-free, high resolution imaging and lets you image below 1 kV easily.
Magnetic field-free imaging of samples with sub 1 nm resolution below 1 kV - without the need for sample biasing or monochromation is enabled by Gemini 3 which includes the Nano-twin lens and the new electron optical engine Smart Autopilot.
Achieve images of non-conducting, vacuum- sensitive material with a new variable pressure mode and detection system: ensure fast results and preserve features by bringing vacuum-sensitive specimens into the chamber through the new Gentle Airlock in VP mode.
Analyze delicate samples with ease by leveraging the new, large chamber with dual EDS ports. Produce fast, shadow-free mapping ensured by an optimum detector solid angle.

Expert Knowledge Integrated

Imaging of challenging samples is now accelerated by the new electron optical engine Smart Autopilot.
Perform easy sample navigation by leveraging the greatly increased system’s field of view.
Smart Autopilot lets you save time while making lengthy alignments obsolete: the engine drives the electron optics to provide magnifications from less than 1× up to 500kx, taking care of alignment, calibration and focus along the way.
Smart Autopilot includes a new patented parallax autofocus and a new auto-wobble that provide you with clear, crisp images within seconds.
Python scripting is able to use these features in automated workflows such as 3D STEM tomography.

Experience Unique Contrast

Finding the sweet spot in your working conditions means that you’ve selected exactly the right combination of parameters to achieve the perfect image: the trick is finding it.
Gemini column technology with its magnetic field-free imaging and its new Gemini 3 column enables you to find these sweet spots and discover new information from your sample.
Magnetic contrast imaging is easy for GeminiSEM 560 with a magnetic field on the sample of less than 2 mT.
Perform energy spectroscopic imaging with the energy-selective Inlens back-scatter detector while simultaneously incorporating electron angular spectroscopic imaging, with the annular backscatter detector.
Bring all of your data together with ZEN Connect to segment and report on your findings with ease.

What kind of research is the Center for Applied Quantum Technology interested in?

Dr. Mario Hentschel, University Stuttgart, 4th Physics Institute and Center for Applied Quantum Technology, Germany.

Polymer-based Fresnel lens, produced by injection compression molding.

Dr. Mario Hentschel from ZAQuant, the Center for Applied Quantum Technology at the University of Stuttgart, describes the topics and applications the group is working on, the challenges they face in their laboratory, and how they use ZEISS GeminiSEM 560.

“We are dealing with complex micro- and nanostructures for optical sensing and detection applications at the ultimate limit. Consequently, it is important for us to inspect and characterize our devices on a nanometer scale. In-depth knowledge is not only essential for process control and optimization but also in order to unravel the local phenomena involved in our sensing and detection schemes. Apart from mere topographic information, we are also interested in the nanoscale material composition as well as intentional and accidental local impurities.

All these applications require a large flexibility of the electron microscope. ZEISS GeminiSEM 560 is offering us an astonishing degree of freedom and flexibility. The broad choice of detectors allows us to image and highlight topography, material contrast, edges on the surface and all the different features of our samples. We are routinely faced with very different sample geometries, in terms of sample sizes as well as material composition, which puts significant constraints on the microscope. We are able to obtain highest quality images even from very demanding and challenging samples, such as highly insulating polymers and plastics, showing minimal effects due to charging. The system can image at low and very high magnification. In the near future, the GeminiSEM 560 will be housed in the clean room of the newly constructed research building of the Center for Applied Quantum Technology (ZAQuant) here in Stuttgart. The diverse background of the principal investigators joining in ZAQuant, coming from physics, mechanical and electrical engineering, chemistry, and more have highly varying requirements, rendering flexibility a crucial feature while maintaining imaging excellence. The GeminiSEM 560 will thus definitely be an enabling technology for their research which we feel that this instrument can provide it in a very flexible way."

Dr. Mario Hentschel, University Stuttgart, 4th Physics Institute and Center for Applied Quantum Technology, Germany.
Both images: courtesy of 4th Physics Institute and Center for Applied Quantum Technology (ZAQuant), University of Stuttgart, Germany.

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The Technology Behind

Gemini Electron Optics

Gemini 1

What You Always Wanted to Know about the Fundamentals

Field emission SEMs are designed for high resolution imaging.
Key to the performance of a field emission SEM is its electron optical column. Gemini is tailored for excellent resolution on any sample, especially at low accelerating voltages, for complete and efficient detection, and ease-of-use.

Gemini optics are characterized by three main components:

The Gemini objective lens design combines electrostatic and magnetic fields to maximize optical performance while reducing field influences at the sample to a minimum. This enables excellent imaging, even on challenging samples such as magnetic materials.
Gemini beam booster technology, an integrated beam deceleration, guarantees small probe sizes and high signal-to-noise ratios.
The Gemini Inlens detection concept ensures efficient signal detection by detecting secondary (SE) and backscattered (BSE) electrons in parallel minimizing time-to-image.

For your applications benefit from:

Long-term stability of the SEM alignment and the effortless way it adjusts all system parameters such as probe current and acceleration voltage.
Achieve distortion-free, high resolution imaging with the help of the near magnetic-field free optics.
Get information solely from the top-most layer of your samples with the Inlens SE detector that produces images out of the truly surface sensitive SE 1 electrons.
Obtain true material contrast at very low voltages with the detection concept of the Inlens EsB detector.

Gemini 2

Capitalize on Gemini 2 Optics

A comprehensive characterization of any sample calls for performance in imaging and in analytics. Plus, today’s users expect the set up and handling of the instrument to be easy.

The Gemini 2 optics answers these demands:

GeminiSEM 460 comes with Gemini 2 optics featuring a double condenser
Adjust the beam current continuously while the spot size stays optimized simultaneously
Switch seamlessly between high resolution imaging – at low beam currents – and analytical modes – at high beam currents
You save time and effort because there’s no need to realign the beam after changing imaging parameters
Stay flexible: use the highest beam current density for high resolution imaging and analysis at both low and high beam current, independently of which beam energy you select
Your specimen won’t be exposed to a magnetic field: achieve distortion-free EBSD patterns and high resolution imaging over a large field of view
Tilt the specimen without influencing the electron optical performance. Image even magnetic samples easily
Choose a charge reduction mode that suits your sample best: local charge compensation, variable pressure in the chamber or NanoVP

Gemini 3

Gemini 3 – The Evolution Goes on

Today’s FE-SEM applications demand high resolution imaging at low landing energy as a standard.

It is essential for:

Beam sensitive samples
Non-conductive materials
Gaining true sample surface information without undesirable background signal from deeper sample layers

The Gemini 3 optics are optimized for resolutions at low and very low voltages, and for contrast enhancement. They ensure maximum resolution at all working conditions from 1 kV to 30 kV and consists of two components which work synergistically: the Nano-twin lens and Smart Autopilot, a new electron optical engine. Additional technological characteristics are the high gun resolution mode and the optional Tandem decel.

The Nano-twin lens delivers:

Sub-nanometer resolution at low and ultra-low voltages with excellent signal detection efficiency
Three times lower lens aberrations at low kV compared to the standard Gemini objective lens - resulting in a three times lower magnetic field on the sample, of the order of 1 mT
Optimized geometry and the electrostatic and magnetic field distributions
An enhanced Inlens detector signal under low voltage imaging conditions

These characteristics provide the ability for sub-nanometer imaging below 1 kV without immersing the sample in an electro-magnetic field.

Smart Autopilot
In combination with the Nano-twin lens, Smart Autopilot lets you benefit from:

Best possible resolution at each working energy through condenser optimization of the beam convergence angle for all working conditions
Seamless transition between sample navigation and high-resolution imaging realized by a new, large field of view overview mode
Optimum image quality achieved at high speed with a new, patented autofocus

How it works:

Smart Autopilot optimizes electron trajectories through the column thus ensuring the highest possible resolution at each acceleration voltage
The autofunctions enable a seamless alignment free transition across the entire magnification range from 1× to 2,000,000× and a 10× increase in the field of view allowing a 13 cm object to be imaged in a single frame
The image framestore of 32k × 24k in combination with the new overview mode ensure a stitching free pixel density over an unparalleled field of view

Resolution Modes

High resolution gun mode

Minimized chromatic aberration thanks to of a reduction of primary energy width by 30%
Allows even smaller probe sizes

Tandem decel

Tandem decel, a two-step deceleration mode, combines the beam booster technology with a high negative bias voltage that is applied to the sample: the electrons of the primary electron beam are decelerated, thus the landing energy is effectively reduced
Use this to further improve resolution below 1 kV and boost the detection efficiency of backscattered diode detectors.
Tandem decel optional sample biasing up to 5 kV further improves the excellent imaging capabilities at low voltages.

Magnetic FeMn Nanoparticles, edge length of a cube ca. 25 nm. GeminiSEM 560, 1 kV, Inlens SE, field of view 565 nm.

Applications

ZEISS GeminiSEM

Nanoscience & Nanomaterials

Typical Tasks and Applications

Visualizing structure, integrity and failure in nanoelectronic and photonic devices
Imaging sensitive specimens such as 2D materials while avoiding major beam damage, charging effects or image distortions
Studying nanomagnetism and nanomechanics at high resolution, characterizing the material’s surface topography and analyzing its elemental composition
Creating and evaluating the quality of devices for nanofluidic experiments

Magnetic FeMn Nanoparticles, edge length of a cube ca. 25 nm. GeminiSEM 560, 1 kV, Inlens SE, field of view 565 nm.

Structured gold platelets as part of fundamental research on plasmonic effects. GeminiSEM 560.

Overview mode, extremely large field of view, three Euro coins. GeminiSEM 560.

Energy Materials

Typical Tasks and Applications

Microstructure and device evaluation
Defect analysis
Phase distribution
Pore and crack quantification

NCM622 cathode particles after 500 charge cycles, 1 kV, Inlens SE detector.

Uncoated polymer electrolyte fuel cell.

CIGS solar cell on an alumina substrate at 1.8 kV, Inlens SE detector.

Engineering Materials

Typical Tasks and Applications

Versatile materials characterization at sub-nm resolution, with superior contrast and sharpness
Metallography and fracture analysis
Characterization of in situ material behavior under varying conditions
Generation of experimental data for validation and improved fidelity of simulation models.

A stainless-steel sample imaged under in situ tensile load test
Using the AsB detector, images have extremely high contrast and capture the slip bands formation during in situ loading as shown in the images of before (left) and after loading (right).

before loading

after loading

Cross-sectional image of stainless-steel surface after surface preparation using sand blasting.
The crushed SiO₂ shows positive charging on the left image. Contrast visible only at large working distance of 5 mm (left) versus a closer working distance of 1 mm (right).

large working distance of 5 mm

closer working distance of 1 mm

Cross-section of Al₂O₃/ZrO₂-3mol%Y₂O₃ nanocomposite powder
Imaged with the BSE detector at 1 kV landing energy with no bias (left) and at 1 kV landing energy with 5 kV bias (right), providing enhanced material contrast and sharpness.

1 kV landing energy with no bias

at 1 kV landing energy with 5 kV bias

Bio-inspired Materials, Polymers and Catalysts

Typical Tasks and Applications

Surface characterization and evaluation
Structural analysis, segmentation and quantification
Correlative multiscale characterization due to typical hierarchical structure of some bio- materials
Failure analysis and process control

Cross-linked gelatin nanofibrous scaffold for tissue engineering.

Polyurethan film.

Ruptured surface of a polymer.

Microscopy Solutions for Industry

Typical Tasks and Applications

Failure analysis on mechanical, optical or electronic components
Fracture analysis and metallography
Surface, microstructure and device characterization
Compositional and phase distribution
Impurity and inclusion determination

Brittle failure of a steel sample in tension.

Inclusions in steel, Inlens SE detector, 500 V.

Lithium ion battery cathode. EDS compositional mapping.

Semiconductor Device Design and Failure Analysis

Typical Tasks and Applications

Construction analysis and benchmarking
Passive voltage contrast
Subsurface analysis
Electronic property measurement with probing
TEM site selection

The electronic properties of passive voltage contrast can be compared to subsurface structural information by increasing the beam landing energy, in this case using 1 kV for PVC (left) and 3 kV for the subsurface imaging (right). The superb stability of the Gemini column enables a seamless workflow.

1 kV for PVC

3 kV

Probing during imaging can give further insight into function. Here, electron beam absorbed current (EBAC) shows the connectivity of a circuit with a probe tip landed at one node (first).
EBAC at increasing tensions (first and second: 2 kV, third: 5 kV, fourth: 8 kV) shows the electronic structure at lower metal layers.

Connectivity of a circuit with a probe tip landed at one node: 2 kV

EBAC at 2 kV.

EBAC at 5 kV.

EBAC at 8 kV.

Life Sciences

Typical Tasks and Applications

Characterization of topology
Imaging sensitive, non-conductive, outgassing, or low contrast samples
Visualizing the ultrastructure of cells, tissues etc. at high resolutions
Imaging very large areas such as serial sections or block faces

Tissue, cells or viruses & STEM imaging: SARS-CoV-2 grown in a tissue culture and inactivated by chemical fixation. The virus was negatively stained.
Imaged with GeminiSEM 560, aSTEM, false colored.
Sample: courtesy of M. Hannah, Public Health England, UK.

SARS-CoV-2 virus, STEM image.

Investigate large areas with array tomography, serial section & block face Imaging: root nodules of Fabaceae beans. The large field of view is important for analyzing rare events in section ribbons or for statistical analysis of infections, as in these root nodules that are infected with bacteria. The Array Tomography module of ZEISS Atlas 5 allows you to build 3D volumes out of serial sections. The movie shows 78 sections out of one ribbon.

Life sciences often deal with low contrast samples and correlative experiments are challenging when essential features lack contrast. With Tandem decel you can introduce an electrical deceleration or bias between the sample and objective lens and achieve a dramatic increase in contrast. Imaged with GeminiSEM 560.

Applying Tandem decel increases contrast to such an extent that all cell organelles are clearly visible at high resolution.

Accessories

ZnO nanoparticles on carbon film, back-projection reconstruction showing the 3D morphology of the nanoparticles.

3D STEM Tomography

Automated STEM tomography on an FE-SEM is now put at your disposal. A script for automated acquisition of a STEM tilt series uses the API and performs compucentric, rotation and tilt stage movements as well as autofocus and image acquisition. Feature tracking compensates for shifts throughout the entire tilt series and keeps the drift between two images to a minimum of around 50 nm. The STEM sample holder allows to tilt the stage to 60° and to perform a 180° rotation, and the aSTEM detector covers all requirements. 3D reconstruction software then takes this output and renders a 3D model of your sample.

ZEISS Atlas 5 – Master Your Multi-scale Challenge

Atlas 5 makes your life easier: create comprehensive multi-scale, multi-modal images with a sample-centric correlative environment. Atlas 5 is the powerful yet intuitive hardware and software package that extends the capacity of your scanning electron microscope.

Multi-modal investigation of an electronics part, connecting images from light microscopy and SEM and analytical data in EDS maps. View of the GUI of the correlative workspace of a ZEN Connect project with aligned data. Sample: Electronics part, embedded and mechanically polished cross-section. Sample: courtesy of Aalen University, Materials Research Institute, Aalen, DE.

ZEISS ZEN core

Capitalize on multimodal, multiscale experiments and protect your investment with a clear upgrade path capability. Improve your system as new features are released and leverage the fact that all GeminiSEMs are plugged into the ZEISS ZEN core ecosystem. This gives you access to:

ZEN Connect - organize and align your image data in the correlative workspace.
ZEN Intellesis - for advanced AI-powered, machine or deep learning for image segmentation.
ZEN data storage - manage projects centrally by connecting data from different instruments.
ZEN Automated Imaging for SEMs – helps to bridge light and electron microscopy by simplifying electron microscope operation.
ZEN’s analytical modules - report and analyze segmented data in materials’ research, e.g. GxP, grains, NMI analysis.

3D Surface Modelling – 3DSM

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional sotware package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of the aBSD or the AsB detector.

Lithium-ion Battery

Visualization and Analysis Software

ZEISS recommends Dragonfly Pro from Object Research Systems (ORS)
An advanced analysis and visualization software solution for your 3D data acquired by a variety of technologies including X-ray, FIB-SEM, SEM and helium ion microscopy.Available exclusively through ZEISS, ORS Dragonfly Pro offers an intuitive, complete, and customizable toolkit for visualization and analysis of large 3D grayscale data. Dragonfly Pro allows for navigation, annotation, creation of media files, including video production, of your 3D data. Perform image processing, segmentation, and object analysis to quantify your results.

Mouse lung tissue, block-face images, acquired with Focal Charge Compensation

Enhance Your GeminiSEM 360 / 460 to Eliminate Charging Effects

Turn your ZEISS GeminiSEM 360 or GeminiSEM 460 into a super-quick high resolution 3D imaging system with 3View^® technology from Gatan, Inc. 3View^® is an ultramicrotome inside the SEM chamber that lets you acquire high resolution 3D data from resin-embedded cell and tissue samples – in the shortest possible time and the most convenient way. The sample is continuously cut and imaged so you can produce thousands of serial images in a single day. Unique ZEISS Gemini column technology makes the GeminiSEMs ideally suited to support this application. Now you can also enhance your GeminiSEM with Focal Charge Compensation to eliminate charging effects. ZEISS has released this gas injection system in collaboration with the National Center for Microscopy and Imaging. With Focal Charge Compensation, the result is spectacular image quality. When performing 3D nanohistology, electron microscopic investigation of tissue samples such as liver, kidney and lung by block-face imaging is extremely valuable for pathological research. By using Focal Charge Compensation to eliminate charging, these charge-prone tissue samples can be imaged with high resolution and speed in three dimensions.