The World’s Fastest Scanning Electron Microscopes
With MultiSEM you unleash the acquisition speed of up to 91 parallel electron beams. Now, you can image samples in the centimeter – scale at nanometer resolution. This unique scanning electron microscope (SEM) is designed for continuous, reliable 24/7 operation. Simply set up your high-throughput data acquisition workflow and your MultiSEM will acquire high contrast images automatically, all by itself.
You control MultiSEM with the proven ZEN imaging software from ZEISS: all options of this powerful SEM are organized in an intuitive yet flexible way.
MultiSEM uses multiple electron beams (green: illumination path) and detectors in parallel. A finely tuned detection path (red) collects a large yield of secondary electrons (SE) for imaging. Each beam carries out a synchronized scanning routine at one sample position, resulting in a single sub-image. The electron beams are arranged in a hexagonal pattern. The full image is formed by merging all image tiles.
A parallel computer setup is used for fast data recording, which increases the total imaging speed. Image acquisition and workflow control are fully separated in the MultiSEM system.
Brain mapping in high resolution - nature.com (Neurobiology)
Connectomics (Cell Press Nucleus)
Multiple-Beam Scanning Electron Microscopy (Microscopy Today)
Further advancing the throughput of a multi-beam (Metrology, Inspection, and Process Control for Microlithography)