Digital Solutions For higher productivity, cycle time reduction and reliability improvement
ZEISS offers several automation applications running on the FAVOR® computational engine. FAVOR® solutions enhance productivity and reliability through intelligent automation and enabling technologies. Significant time savings and an improved reliability result from reduction of manual steps and human error. Modular applications provide solutions to specific manufacturing needs. Down below you find the variety of system boosting software programs.
AIMS® Auto Analysis Full automation of data analysis
AIMS® AutoAnalysis runs independently from tool software, allowing the AIMS® tools to be dedicated for measurements only while the analysis runs in parallel. It optimizes processes as it improves productivity, saves operator time and standardizes results.
AIMS® AutoAnalysis EUV
Automation for AIMS® EUV
AIMS® AutoAnalysis EUV extends the automated defect verification to the segment of high-end EUV mask manufacturing.
Advanced Repair Center
Optimizes the back end of line productivity
The Advanced Repair Center ARC is capable of connecting tools and software products in a smart way.
Video about the Advanced Repair Center ARC
ARC connects systems and software products in a smart way.
MeRiT® AutoAnalysis Increases productivity and optimizes capactiy
MeRiT® AutoAnalysis MAA provides a fully automated analysis solution for photomask repair workflows on MeRiT®. Independent of the tool software, pre and post repair SEM images can be analyzed in parallel to other activities which leads to significant time savings. Apart from the availability of the analysis history in one single place, the application offers sophisticated analysis strategies compatible with high end EUV mask repairs. High sensitivity to defect detection ensures quality targets and prevents users to overlook required repair rework.
ForTune Tuning Module Simulates jobs and generates tuning recipes
The ForTune Tuning Module software package facilitates recipe creation as well as extensive data analysis and simulations prior to the ForTune process (CDC & RegC® applications). This module’s versatile job handling capabilities ensure high process efficiency, superior prediction accuracy and on-the-spot decision making.
Local Registration Map
Deviations measuring at a large scale
The Local Registration Map LRM is a PROVE® application, which allows to perform dense local registration measurements at unprecedented spatial resolutions with significantly improved throughput. Amongst applications such as sophisticated Overlay prediction the LRM functionality is a key enabler for new calibration schemes for state-of-the-art e-Beam writers (VSB and MBMW).