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Optics worth celebrating

ZEISS Gemini Optics Is Turning 30 Years

These are the achievements that the scientific community is celebrating

Enabling Highest Image Quality

Discover higher resolution and advanced image quality

Seeing the True Surface Information

Precisley distinguish information of material topography and surface characteristics

High Resolution for Surface Sensitive Materials

Image even sensitive surfaces in highest possible detail

Enabling New Research Achievements

Discover what other researchers have achieved with this technology
Dr. Mario Hentschel​
Testimonial Dr. Mario Hentschel Head of Cleanroom and Nanostructuring Facilities, first user of GeminiSEM 560

"We are dealing with micro- and nanostructures for optical sensing. Consequently, it is important to characterize devices on a nanometer scale. These applications require a large flexibility of the electron microscope. ZEISS GeminiSEM 560 is offering us an astonishing degree of freedom and flexibility. We obtain highest quality images even from very challenging samples, such as highly insulating polymers, showing minimal effects due to charging. The GeminiSEM 560 will thus definitely be an enabling technology for our research which we feel that this instrument can provide it in a very flexible way.​​"

Testimonial Dr. Theresa Magorian Friedlmeier Senior Scientist Group Lead - Analysis and Simulation · Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg (ZSW)

"Microscopy is necessary for us to evaluate our layered systems. While the optical and electrical measurements provide us with the most relevant information about the solar cell function, we require materials analysis to relate the results to the processing. Since our layers are very thin, we use electron microscopy to determine the layer thicknesses in a cross-section image, either by cleaving or by FIB. The microstructure in the top view or cross-section provides us with information about grain size and roughness, as well as uniformity."

Testimonial Kennedy Nguyen The Imaging and Microscopy Facility (IMF) Manager at the University of California Merced

"As a core facility we have various instruments being shared by the entire university. Each lab has specific users with research that involves the SEM. Usually I help in the initial phases of their research and once they’re comfortable on their own, they operate the tool themselves. (This instrument) [,the GeminiSEM,] is nice because it’s one of the easiest SEMs to use, in my opinion."

Dr. Gong Ming
TESTIMONIAL Dr. Gong Ming Deputy director, Lab of mechanical & materials science, University of science & technology, China

Dr. Gong Ming is using ZEISS GeminiSEM to serve more than 50 major projects of the National Natural Science Foundation, National Outstanding Youth Science Fund projects, National Key research and development programs.

Dr. Keyongsu Jeon
TESTIMONIAL Dr. Keyongsu Jeon Senior Researcher Daegu Technopark, Technical Infrastructure Support Division Nanotechnology Processing Center, Korea

Dr. Keyongsu Jeon is currently researching various types of samples, such as nano-materials/components, ceramics, metals, polymers, bio or semiconductors, from diverse customers (both industries and academics).

Dr. Liuwen Chang
TESTIMONIAL Dr. Liuwen Chang Professor, Department of Materials and Optoelectronic Science, National Sun Yat-sen University, Taiwan

Dr. Chang, who researches electro-epitaxy of metals and compound semiconductors, uses SEM-based techniques such as EBSD, ECP, and ECCI to provide microstructural information of the epilayers in a non-destructive manner.

Dr. Jae Kim
TESTIMONIAL Dr. Jae Kim Senior Researcher Ulsan Technopark, Fine Chemical & Material Technology Support Division, Korea

Dr. Jae Kim is currently researching the characterization of materials using scanning electron microscopy. He is particularly focused on the imaging of 3D printing-related polymeric materials, metal powders, and composites.

Dr. Satyam Suwas
TESTIMONIAL Dr. Satyam Suwas Professor & Chair, Department of Materials Engineering, IISC, Bangalore

Dr. Satyam Suawas is currently researching deformed and annealed metals and alloys.

Dr. Savitha Purakkat
TESTIMONIAL Dr. Savitha Purakkat National Nanofabrication Centre, Centre for Nanoscience and Engineering, Indian Institute of Science, India

Dr. Savitha is currently researching dielectric film like, Al2O3, sub 50nm feature imaging.

Discover How Gemini Optics

has evolved
1 of 9

ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics. Innovations in electron optics and a new chamber design let you benefit from better image quality, usability and flexibility. Take sub-nanometer images below 1 kV without an immersion lens. Discover how Gemini optics has improved and evolved over time.

  • 1993

    Gemini 1 |
    First FESEM With GEMINI Optics​

    The combination of magnetic and electrostatic lens (Gemini optic lens) opens access to the world of low kV imaging. Photoresist and ceramic samples can be imaged uncoated without charging effects at high resolution with the DSM 982 Gemini.

  • 2003

    First Backscatter Detection (BSD)
    at Low kV

    The EsB detector is enabling  in-column backscatter detection for the first time. The unique energy filtering properties are used to enhance the material contrast. Even nanocomposites  can be analyzed with good material contrast with a small interaction volume.
    Conventional diode detectors were not able to work below 5 kV, but the in-column EsB can provide this.

  • 2004

    Introduction of Sweet Spot Imaging

    Cazaux and Grillon are publishing results showing the influence of the working distance for selective contrast imaging with the Gemini objective lens. ​
    Sweet spot imaging means systematically varying the SEM accelerating voltage and working distance for optimum image quality.

  • 2009

    Correlative or Multi-Modal Microscopy

    Correlative microscopy enables relocating regions of interest (ROI) in specimens in an electron microscope, which were previously identified in a light microscope and vice versa. The entire process takes only a few seconds. This opens up totally new dimensions in microscopy e.g., identification of ROIs with light microscopy and subsequent analytics in the SEM.

  • 2010

    Gemini 2 |
    Double Condenser

    The upper condenser sets the beam current, the lower condenser accounts for optimum resolution by optimizing the aperture angle, enabling high resolution at all beam currents. For a larger depth of field, the system can be switched to a different imaging mode and the convergence angle will be decreased. 

  • 2015

    GeminiSEM with Nano-twin Lens
    and NanoVP

    The Nanotwin objective introduces a new lens design with lower aberration coefficients. It is optimized for ultra high resolution at low kV.

  • 2018

    Machine Learning for Microscopy

    Zeiss ZEN Intellesis produces powerful machine learning segmentation of multidimensional images. It enables image segmentation and object classification without the need to code a single line.

      

  • 2020

    Gemini 3 |
    Introduction of Smart Autopilot

    With the Smart Autopilot, part of the new electron optical engine, Gemini 3 is able to ensure the highest possible resolution at each acceleration voltage. 
     

  • 2023

    Gemini Optics Is Turning 30 Years 🎉

    What an anniversary! Scroll further down to explore which microscopes use the technology, to which extend and last but not least, how the technology that we celebrate today works.

    ⬇️

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What Makes the Difference?

Find out, which microscopes are using Gemini optics and what their advantages are

  • ZEISS GeminiSEM

    FE-SEM For Highest Demands in Sub-nanometer Imaging, Analytics and Sample Flexibility

    ZEISS GeminiSEM stands for effortless imaging with sub-nanometer resolution. These FE-SEMs (field emission scanning electron microscope) combine excellence in imaging and analytics.

    Discover Applications

Click on the circle markers on the image to open the information box with more details.

Discover Gemini Optics

Filter Grid Energy filter for the SEM

The grid voltage can select secondary or backscatter electrons for detection.
Condenser Electromagnetic lens

This lens is defining beam current and spot size with optimized aperture angles.
Inlens EsB detector Energy selective Backscatter detector

The EsB detector enables material contrast detector even at lowest voltages; a filter grid allows for the discrimination of backscattered electrons according to their energy.
Beam Booster In-column beam deceleration

The beam booster is an integrated beam deceleration that guarantees small probe sizes and high signal-to-noise ratios. The booster-potential boosts the beam through the column at high kV benefiting from reduced aberrations and protection from external stray fields and decelerates it at the pole piece enabling best image quality even at low kV.
FE-gun Electron source

Thermal field emission gun with a small tip, for small spot sizes.
Inlens SE Detector Highly efficient in-column detection

Secondary electrons are collected from the sample surface for ultra high resolution, surface sensitivity and unique contrast.

Gemini Objective Electron probe forming lens

The objective lens is focusing the probe on the sample.

Magnetic Lens Electron lens incl. polepiece and coils

Together with the electrostatic lens (Gemini objective) electrons are focused to deliver ultra high resolution.
Sample Sample mounted on holder

From nanoparticles to large machine parts, SEM investigation is possible with very little sample preparation.

Electrostatic Lens Electron lens

Together with the magnetic lens (Gemini objective) electrons are focused to deliver ultra high resolution.

Scan Coils Scanning the beam over the sample (“raster” principle)

The electron beam is scanned and the signal detection is sychronized and forms the image.

One Poster for Each Decade

Receive three posters about Gemini optics
  • Artificial intelligence for microscopy: Latest industry trends
  • THE SCANNING ELECTRON MICROSCOPE
  • Discover ZEISS Gemini optics
  • The Evolution of Gemini Optics

Register here to receive a poster for each decade of Gemini optics

The first 1000 Registrants* can look forward to a free printed version sent via mail

Register here to receive a digital version of the Gemini optics posters.
As a special celebration gift for this anniversary, we will distribut printed versions to the first 1000 registrations via mail. 
First come- first served, so be quick *

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* The Sendout of Printed posters is limited to the first 1000 Registrants. First come, first served. Unfortunately we have to announce that recipients from Jemen, Lybia, Niger, Somalia, Sudan, Syria, Tonga, Turkmenistan and Tuvalu can only receive a digital version from these three posters, as our distribution partner excludes these countries from the sendout.