![ZEISS Crossbeam 550 Samplefab]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.100.100.file/crossbeam-550-samplefab_w_monitor-left.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.360.360.file/crossbeam-550-samplefab_w_monitor-left.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.768.768.file/crossbeam-550-samplefab_w_monitor-left.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/crossbeam-550-samplefab_w_monitor-left.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/crossbeam-550-samplefab_w_monitor-left.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/crossbeam-550-samplefab_w_monitor-left.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w_monitor-left.jpg/_jcr_content/renditions/original./crossbeam-550-samplefab_w_monitor-left.jpg"} "ZEISS Crossbeam 550 Samplefab")
ZEISS Crossbeam Samplefab
FIB-SEMで自動化されたTEM用試料作製を簡素化
ZEISS Crossbeam 550 Samplefabは、高性能で堅牢な事前構成済みFIB-SEMです。これにより、半導体ラボにおいて完全自動化・無人運転によるTEM試料作製が可能になります。高品質の試料と優れた自動化信頼性を確保し、特に複数部位の試料作製において高いラメラ作製成功率を誇ります。柔軟性を損なわずに迅速なトレーニングと最適な効率を実現する、直感的なユーザーインターフェースをご活用ください。
TEMラメラ試料作製を簡素化
業界をリードする自動化率を実現
![ZEISS Crossbeam 550のユーザーインターフェース]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.100.100.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.360.360.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.768.768.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.1024.1024.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.1280.1280.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.1438.1438.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-samplefab_user-interface.jpg/_jcr_content/renditions/original.image_file.1438.1438.241,0,1679,1438.file/crossbeam-samplefab_user-interface.jpg"} "ZEISS Crossbeam 550のユーザーインターフェース")
使いやすいインターフェース
簡単な操作
Crossbeam 550 Samplefabのユーザーインターフェースは、全体を通して初心者からエキスパートまで誰もが素早く学び直感的に操作できるよう再設計されており、シームレスに操作できます。強化されたコントロールソフトウェアは安定性と使いやすさを向上させ、操作プロセスをさらに効率化します。
自動化されたTEM用試料作製
最適な結果を提供
ZEISS Crossbeam 550 SamplefabのハンズフリーTEMラメラ作製プロセスでは、8時間以内に10個のラメラを作製し、貴重な時間とリソースを節約できます。独自のリフトアウト技術は優れた自動化率を実現するほか、様々な半導体の試料タイプで100 nmまでの薄片化を可能にし、常に高品質な結果を提供します。
![直近100件のラメラ実験の統計を示すグラフ]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original.image_file.100.100.file/automation-yield-promise.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original.image_file.360.360.file/automation-yield-promise.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original./automation-yield-promise.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original./automation-yield-promise.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original./automation-yield-promise.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original./automation-yield-promise.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/automation-yield-promise.jpg/_jcr_content/renditions/original./automation-yield-promise.jpg"} "直近100件のラメラ実験の統計を示すグラフ")
優れた自動化率
非常に高い成功率
レシピベースの自動化は、オペレーターの介入がないバルク試料からTEMグリッドまでの自動ラメラ処理において、90%以上の自動化率を約束します。自動チェックにより人間の介入が可能になり、処理中にラメラが失われることなく、ラメラ作製成功率を100%に近づけることができます。
安定した効率的なワークフロー
生産性向上を目指して
Crossbeam Samplefabのワークフローは非常に堅牢で、1本のプローブチップを使用して数十のラメラを作製できます。このプローブチップを何日も酷使した後でも、必要なのは再形成だけです。これにより、ツールの生産稼働時間が大幅に向上し、消耗品のコストが削減され、結果的に時間とコストの両方を節約できます。
TEM試料作製に対する業界の増大するニーズに応えるため、それに特化したFIB-SEM、Crossbeam 550 Samplefabを開発しました。ZEISSの目標は、現在の市場で最も堅牢な自動化技術を提供することであり、100 nmまでの薄いラメラの完全無人操作を高い精度とスループットで実現することです。
![Thomas Rodgers博士のプロフィール画像]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.100.100.29,47,503,521.file/thomas-rodgers-headshot.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.360.360.29,47,503,521.file/thomas-rodgers-headshot.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.474.474.29,47,503,521.file/thomas-rodgers-headshot.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.474.474.29,47,503,521.file/thomas-rodgers-headshot.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.474.474.29,47,503,521.file/thomas-rodgers-headshot.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.474.474.29,47,503,521.file/thomas-rodgers-headshot.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/thomas-rodgers-headshot.jpg/_jcr_content/renditions/original.image_file.474.474.29,47,503,521.file/thomas-rodgers-headshot.jpg"} "Thomas Rodgers博士 ZEISS Microscopy エレクトロニクス事業部長")
ダウンロード
詳細はZEISS Crossbeam 550 Samplefabのパンフレットをご覧ください。
![]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.100.100.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.360.360.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.768.768.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.1024.1024.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/en_product-flyer_crossbeam_550_samplefab_cover.jpg/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/en_product-flyer_crossbeam_550_samplefab_cover.jpg"})
![ZEISS Crossbeam - 3D分析と試料作製を高いスループットで実現するFIB-SEM]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.100.100.file/crossbeam-550-system.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.360.360.file/crossbeam-550-system.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.768.768.file/crossbeam-550-system.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/crossbeam-550-system.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/crossbeam-550-system.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/crossbeam-550-system.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original./crossbeam-550-system.jpg"} "ZEISS Crossbeam")