Webinar
FEG-SEM as a Flexible and Smart Tool for R&D Nanolithography
19 June 2020
· 42 min watch
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Author
Pasqualantonio Pingue, Ph.D.
Chief Operating Officer (COO) at NEST Laboratory of Scuola Normale Superiore, Italy
Abstract
FEG-SEM as a Flexible and Smart Tool for R&D Nanolithography
Creation of nanostructures and nanodevices using a focused ion beam is widely used in materials research and electronics. It allows the creation of new functional materials or surfaces with superior optical, mechanical, electronic or magnetic properties. In this session we will explore these applications to highlight the future development and the constraints encountered in this field.
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![Finalists of the ZEISS Microscopy Young Researcher Award | Germany]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.100.56.file/young-researcher-award-2023-clean.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.360.203.file/young-researcher-award-2023-clean.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.768.432.file/young-researcher-award-2023-clean.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.1024.576.file/young-researcher-award-2023-clean.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png"} "Finalists of the ZEISS Microscopy Young Researcher Award | Germany")
![NiMH Cylindrical Cell under the X-ray Microscope]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.100.56.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.360.203.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.768.432.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1024.576.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png"} "NiMH Cylindrical Cell under the X-ray Microscope")
![Paul Shearing, University of Oxford]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.100.56.0,0,1080,608.file/paul_shearing.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.360.203.0,0,1080,608.file/paul_shearing.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.768.432.0,0,1080,608.file/paul_shearing.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.1024.576.0,0,1080,608.file/paul_shearing.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.1080.608.0,0,1080,608.file/paul_shearing.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.1080.608.0,0,1080,608.file/paul_shearing.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/campaigns/sector-independent/fy-22-23/microscopy-ai-hub/paul_shearing.png/_jcr_content/renditions/original.image_file.1080.608.0,0,1080,608.file/paul_shearing.png"} "Paul Shearing, University of Oxford")
![ZEISS GeminiSEM Family]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.100.100.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.360.360.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.768.768.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.1024.1024.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.1280.1280.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.1353.1353.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/zeiss_gemini-sem-stage.jpg/_jcr_content/renditions/original.image_file.1353.1353.285,86,1638,1439.file/zeiss_gemini-sem-stage.jpg"} "ZEISS GeminiSEM Family")