Low-kV Scanning Electron Microscopy
Beyond Sample Topography
Iwona Jóźwik, Ph.D.
Łukasiewicz Institute of Electronic Materials Technology
Low-kV Scanning Electron Microscopy: Beyond Sample Topography
FIB-SEM allow to obtain morphological, compositional and analytical information from the surface, and cut cross-sections to image beneath the sample surface at the highest resolution. Moreover, this is the perfect tools to prepare specimens for other microscopic techniques such as TEM or STEM.