MCS device
Spectrometer Modules

ZEISS MCS Series

Flexible High-Performance Spectrometer

MCS UV-NIR has remarkable performance in the 190 - 1015 nm spectral range with great flexibility thanks to different optical entrance and housing designs and detector options for exceptional signal/noise or highest sensitivity.

  • High resolution
  • Fast readout
  • Long-term calibrated
  • Large NA (0.22)
  • High repeatability
MCS device side view

MCS Spectrometer design

Features

The ZEISS MCS has a fiber coupled SMA cross section converter with NA=0.22 and custom slit, maximizing optical throughput. ZEISS aberration-corrected holographic gratings ensure a flat spectral image of 25 mm. Different materials (ceramics/aluminium) and housing designs are provided. MCS modules are available with PDA arrays for highest SNR>11.000 or BT-CCD detectors for low-light applications.

MCS FLEX device

MCS Customized options

Your partner for OEM applications

  • Optical input: SMA cross-section converter/FC connector and/or custom slit 20/40/50/70 μm
  • ZEISS gratings with different blaze wavelengths (200/250/300/750 nm)
  • Selection of custom spectral coverage within 190 - 1100 nm
  • TE-cooled/uncooled BT-CCD or PDA detector options
  • Operating electronics with USB 2.0/3.0/Ethernet interface
  • ZEISS Aspect software or SDK
  • High scalability for volume production
MCS spectrometer module next to plasma chamber in clean room

MCS Applications

ZEISS high-performance allrounder

  • Thickness measurement: displays, photoresists, dielectric layers, coatings
  • Semiconductor: plasma-monitoring, critical dimension measurement, CMP, wafer inspection
  • Pharmaceuticals: compound analysis, high pressure liquid chromatography
  • Environmental sensors: pollution monitoring, continuous emission monitoring systems
  • Food & agriculture: fruit sorting, meat & dairy, plant health monitoring

Specifications

MCS CCD High (UV) sensitivity, housing of ceramics
MCS FLEX CCD High (UV) sensitivity, housing of alluminium alloy
MCS PDA Exceptional SNR,
housing of ceramics
MCS FLEX PDA Exceptional SNR, housing of alluminium alloy

General

Spectral range

190 - 980 nm  

190 - 1015 nm

Resolution (FWHM)

3 nm

3 nm

Stray light

< 0.1 % (@340 nm, Deuterium lamp, NaNO2 50 g/l, 1 cm)

< 0.1 % (@340 nm, Deuterium lamp, NaNO2 50 g/l, 1 cm)

Wavelength accuracy

≤ 0.5 nm

≤ 0.3 nm

Temperature drift

< 0.01 nm/K

< 0.009 nm/K

< 0.005 nm/K

< 0.009 nm/K

Optical entrance

SMA with round-to-line fiber converter (Ø 0.5 mm input, 70 x 1400 μm output), optional slit (20/40/50/70 μm)

SMA with round-to-line fiber converter (Ø 0.5 mm input, 70 x 2400 μm output), optional slit (20/40/50/70 μm)

Numerical aperture

0.22

0.22

Grating

248 l/mm blazed for 250/750 nm

248 l/mm blazed for 250 nm

248 l/mm, blazed for 200/250/750 nm

248 l/mm blazed for 250 nm

Detector

Detector type

Hamamatsu BT-CCD S7031-1006 (1044 x 64 px)

Hamamatsu NMOS S3904-1024Q (1024 px)

Pixel size

24 x 24 μm

25 x 2500 μm

Signal/noise

1000

12000

Electronics (optional)

Digitization

16-bit ADC

16-bit ADC

Integration time

> 3 ms

> 1.1 ms

Interface

USB 2.0, 3.0 / Ethernet

USB 2.0, 3.0 / Ethernet

Environmental/physical

Operating temperature

0… 65 °C (non-condensing)

0… 65 °C (non-condensing)

Dimensions L x W x H

177 x 75 x 128 mm³

160 x 68 x 122 mm³ (short fiber converter), 198 x 68 x 122 mm³ (long fiber converter)

159 x 75 x 108 mm³

160 x 62 x 122 mm³

MCS UV-NIR Spectral Coverage Wavelength Selection Guide

  • Spectral Range
    Detector

    MCS CCD UV-NIR

    190 - 980 nm

    Hamamatsu BT-CCD S7031-1006 (1044x64 px), TE-cooled

    MCS CCD NIR

    600 - 980 nm

    Hamamatsu BT-CCD S7031-0906 (532x64 px), TE-cooled

  • Spectral Range
    Detector

    MCS FLEX CCD UV-NIR

    190 - 980 nm

    Hamamatsu BT-CCD S7031-1006 (1044x64 px), TE-cooled

  • Spectral Range
    Detector

    MCS PDA UV

    200 - 620 nm

    Hamamatsu NMOS S3904-512Q (512 px)

    MCS PDA UV-VIS

    300 - 720 nm

    Hamamatsu NMOS S3904-512Q (512 px)

    MCS PDA UV-NIR

    190 - 1015 nm

    Hamamatsu NMOS S3904-1024Q (1024 px)

    MCS PDA VIS

    360 - 780 nm

    Hamamatsu NMOS S3904-512Q (512 px)

    MCS PDA NIR

    695 - 1100 nm

    Hamamatsu NMOS S3904-512Q (512 px)

  • Spectral Range
    Detector

    MCS FLEX PDA UV-NIR

    190 - 1015 nm

    Hamamatsu NMOS S3904-1024Q (1024 px)

Downloads

ZEISS MCS spectrometer series

    • ZEISS Spectrometer Modules

      Compendium of products, electronic components and software solutions

      Pages: 27
      File size: 2 MB
    • ZEISS OEM Spectrometers for Semiconductor Process Control

      Semiconductor Process Control

      Pages: 3
      File size: 1 MB
    • ZEISS MCS Dimensions

      Pages: 1
      File size: 2 MB
    • ZEISS MCS FLEX Dimensions

      Pages: 1
      File size: 1 MB

Operating electronics & software for ZEISS spectrometers

  • Operating electronics for spectrometers from ZEISS

    ZEISS offers custom-made operating electronics for our MCS spectrometer modules, depending on the detector type: BT-CCD or NMOS photodiode array. This includes the preamplifier, front-end and USB/Ethernet interface electronics as well as the temperature controller for Peltier-cooled CCD image sensors. Different software tools are also provided: ASPECT PLUS acquisition & analysis software or software development kits (SDK) for perfect integration in industrial environments.

  • Preamplifier electronics

    The preamplifier and front end electronics are matched to the spectrometer module. The preamplifier can be mounted directly to the spectrometer module. Its task is the amplification of the low analog output signals of the detector array and minimizing possible analog signal interference.

  • Front end electronics

    Front end electronics act as an adapter between the preamplifier and the interface electronics of a spectrometer system. They preprocesses the amplified analog video signal and perform the analog to digital conversion. The digitized values are then forwarded as byte sequential data stream for the interface electronics. High dynamics and signal stability in the configurations are achieved thanks to quartz-precision timing and integrated filtering of supply voltages.

  • High-speed interface electronics

    ZEISS provides high-speed digital spectral data acquisition controllers with PCI, USB 2.0/3.0 and Ethernet interfaces for PC communication. The interface electronics board thereby acts as connecting piece between the front end electronics and the PC. The 10/100 Base-T Ethernet interface is recommended for long distance communication and is ideally suited for distributed systems and decentralized monitoring.

  • Temperature controller for TE-cooled sensors

    ZEISS MCS CCD spectrometers are especially suited for low-light applications and are equipped with back-thinned FFT-CCD detectors. The MCS CCD is available with a cooled detector with an integrated thermoelectric (TE) cooler to minimize dark current/noise. It is also available with an uncooled CCD detector as well. For operation with a cooled sensor, a PI-type PCB temperature controller is provided. The temperature controller is directly connected to the CCD sensor board and can be stacked onto the preamplifier board. A fan-cooled heat sink guarantees heat dissipation from the CCD sensor. This allows for a cooling stability better than ± 10 mK to be achieved.

  • ZEISS software solutions

    ZEISS provides different software tools to meet spectroscopic analysis and automation needs. A convenient solution is provided by the ready-to-use ASPECT PLUS software package. Running under MS Windows, it easily enables the acquisition and analysis of spectral data. Furthermore, we offer Software Development Kits (SDK) consisting of programming libraries allowing maximum flexibility for user-specific applications.

    The Aspect PLUS software for acquisition and analysis of spectra with clear graphical interface runs on the latest Window versions and controls ZEISS spectrometers. Functions as spectra display, data handling routines, kinetics and calculation of concentrations or color and film-thickness evaluation modules are implemented.

    OSIS SDK is a software development kit to support development of software applications for ZEISS spectrometers. There are several ways to create an application from scratch using one of the provided templates. It is also possible to add OSIS SDK to your existing projects using NuGet packages. The 32/64 bit SDK and the underlying OSIS Framework are based on .NET Standard 2.0 and are not limited to a specific platform or architecture.

Contact & Service

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