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Workshop

Introduction To Rapid, Large Area Laser Milling On The ZEISS Crossbeam

A ZMCC SkillBuilder Workshop

10:00 am - 1:00 pm PST
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Workshop Overview and Agenda

This workshop is intended as an introduction to the rapid, large area fs-laser milling capabilities of the ZEISS Crossbeam. A basic understanding of scanning electron microscopy (SEM), basic experience with SmartSEM and SmartFIB software and basic experience with Ga+ focused ion beam (FIB) milling are required.

This is a 3-hour workshop during which basic fs-laser milling principles will be introduced along with a demonstration of the workflow for setting up and executing laser milling on different materials, including battery cathode/anode materials. This will include an overview of the physical and software components related to laser milling, laser milling parameter selection and testing, patterning setup within the CAD software and verification of milling results in the SEM.
 
It is recommended that attendees secure time on their own instruments after the workshop session to practice what was shown using their own samples.

Who should attend?​

  • Laser Crossbeam owners that want to understand how effectively leverage the rapid, large area milling capabilities of their ZEISS tool.
  • Lab managers, engineers or technicians looking to enhance their knowledge of laser milling and the benefits it offers over other ion milling techniques.

Learning objectives: after completion of this workshop, attendees should:​

  • Gain a basic understanding of fs-laser milling principles.
  • Understand how laser milling performed in a separate chamber mitigates contamination of the main SEM chamber.
  • Understand the laser milling workflow, including how to setup and use the laser milling software.
  • Improve their understanding of best-known-methods for selecting and testing laser milling parameters.
  • Be able to create, import and save milling patterns and parameters.
  • Understand how to perform laser milling of patterns on various materials, including battery materials, and verify the milling results with the SEM.

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This is a paid workshop. ​

Spots are limited.

Topics

  • Introduction and basic principles of laser milling.
  • Setting up the tool for laser milling.
  • Selecting and testing laser milling parameters.
  • Performing laser milling on various materials, including battery anode/cathode materials.
  • Demonstration of the laser milling workflow, including SEM/laser registration, laser recipe selection and verification of milling results in the SEM.
  • Demonstration of mitigation of debris from laser milling performed in a chamber separate from the SEM chamber.

After the workshop sessions, the attendees are strongly encouraged to attempt the methods shown on their own systems with their own samples. Screen sharing sessions to review the data can be setup with the applications team through independent email threads. Our support team will assist in further optimization and answer any questions to help attendees acquire the best data possible.
 

Michael Campin, PhD Applications Engineer

Michael has been working with and promoting FIB-SEM microscopy solutions for over 20 years. He has been an Applications Engineer with ZEISS since 2021 working primarily with GeminiSEMs and Crossbeams. Michael has a background in physics centered around materials science and has extensive experience collaborating with scientists and engineers within the areas of microelectronics materials and process characterization as well as physical failure analysis of microelectronics.

Register for the workshop

This workshop costs $400 per attendee. Please fill out the form below to initiate your registration, and be sure to submit your payment at the link in the automated follow-up email to finalize your registration.

To secure your seat, please submit your payment by August 21th, 2024.

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