FE-SEM Upgrades
Service & Support

FE-SEM Upgrades

For an Increased Life Time
and Extended Functionality

Detectors & Analytics

Analyze your sample through a wide range of different detectors. Different detectors allow you to receive various types of information about the surface, composition and other details which will help you to improve and ease your processes.  

Find the most suitable detectors for your needs:

  • Get a recommendation which detector suits your application
  • Easy application guide
  • Detector specific information
  • Learn more about available functionality
  • Interactive tool to learn more about ZEISS detectors

aSTEM Detector

Get Maximum Information Thanks to Optimized Annular Design

Add transmitted electron imaging capability to your FE-SEM or Crossbeam system. Get additional information out of your ultrathin biological or solid-state specimens without need to use a dedicated Transmission Electron Microscope and enjoy flexibility and versatility.


  • Improved image resolution
  • Ease of use
  • Higher productivity and versatility

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AsB Detector

Improve Low-kV Performance and Increase Productivity

Increase productivity and improve image quality of your FE-SEM by retrofitting the new angle selective Backscatter (AsB) Detector. Benefit from high speed and increased sensitivity due to improved detector and electronics design.



  • Improve low-kV performance
  • Enhanced imaging contrast
  • Steady temperature level

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Update your old AsB Detector

aBSD Detector

Deliver a Great Variety of Contrast Information

The aBSD detector is used to detect backscattered electrons that have been scattered under very low angles. It provides a great variety of contrast information through the detector’s six input channels.


  • Variable imaging
  • Enhanced signal collection
  • Quiet application

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EsB Detector

Make Sub-Surface Information and Nano-Scale Composition Visible

The Energy selective Backscattered (EsB) Detector is suitable for clear compositional contrast. It is an annular shaped in-column detector that is located above the In-lens detector. The ability to detect BSE makes sub-surface information and nano-scale composition visible.


  • More detailed material information
  • Reduced topography effects
  • Energy selective material contrast

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BSD Detector

Enable Real-time 3D Imaging and Surface Metrology

The BSD4 detector is used to detect backscattered electrons that have been scattered under very low angles. The COMPO-Mode is suitable to produce high quality material contrast, meaning heavy materials are displayed brighter than lightweight materials.


  • Improve low-kV performance
  • Enhanced imaging contrast
  • Steady temperature level

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Sense BSD Detector

Imaging Ultrastructure with a New Degree of Speed and Quality

Rapid imaging with the desired resolution requires high electron doses and acceleration voltages, which can cause charging effects and sample damage that compromise image quality. ZEISS Sense BSD combines high-resolution ultrastructural imaging with a new degree of efficiency and image quality, making TEM-like imaging possible with your SEM.


  • Well suited for non-conductive, charge-prone biological samples
  • Best sample protection and avoids image degradation
  • Produces high-quality images in less time

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RISE for Sigma

Extend Your ZEISS Sigma with Fully Integrated Raman Imaging and Scanning Electron Microscopy (RISE)

RISE (Raman Imaging and Scanning Electron Microscope) offers you a chemical and structural fingerprint of your sample: Recognize molecular and crystallographic information and perform 3D analysis of the sample.


  • Ease of use
  • Excellent quality results
  • Long working distance objective

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Great Topographical & Compositional Imaging in All Vacuum Modes

The ZEISS YAG (Yttrium Aluminum Garnet) single crystal scintillator BSD detector enables a higher efficiency of light conductance, which is ideal for low signal imaging. The material which is free of radiation damage turns the YAG BSD into a detector, suitable for all beam energy ranges.


  • Higher signal output
  • Damage prevention
  • Improved versatility

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ES Amplifier for BSD Detectors

Experience Next Level Imaging and Greatly Enhanced Image Quality

The BSD-Detector is used to detect backscattered electrons, that have been scattered under very low angles. The new amplifier provides higher detector efficiencies and delivers a variety of contrast information, much higher gain and a lower noise level.



  • Enhanced signal collection
  • Quiet application
  • Variable imaging

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ETSE for EVO & Sigma

Convincing Topographical SE Imaging

The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.


  • Charging effect reduction
  • Enhanced topographical imaging
  • Superb surface detail

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Improved Signal Collection for Faster Scan Speeds

The fourth generation Variable Pressure SE detector (VPSE G4) convinces with its improved collection signal and thereby a faster response time. Higher scan speeds enable you an increasement of productivity. VPSE G4 provides 20% more contrast up to 400 Pa pressure (at 20 keV).


  • Topographical imaging
  • Increased scan speeds
  • Enhanced low kV imaging

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Embedded EDS Solution for Routine SEM Microanalysis Applications

If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.


  • Optimized for routine microanalysis applications
  • Workflow-guided graphical user interface
  • Total ZEISS service and system support

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Nanostructuring & Patterning

Create structures in nanometer range by either removing or applying surface material and using different systems (e.g. Atomic Force Microscope), or benefit from multi-modal images and comprehensive multiscale with the various options of ZEISS Atlas 5.

Atomic Force Microscope

Upgrade to 3D Resolution at Atomic Level

The Atomic Force Microscope adds calibrated, atomic-level, 3D resolution and high resolution measurements to the existing SEM functionalities.



  • Learn about the mechanical, electrical, chemical and magnetic properties of your sample’s surface
  • Increased productivity and versatility as well as convenient handling

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Atlas 5

Master Your Multi-scale Challenge

ZEISS Atlas 5 makes your life easier: create comprehensive multiscale, multi-modal images with a sample-centric correlative environment.


  • Correlate images in multiple dimensions from multiple sources
  • Fast and easy image acquisition

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Software & Workstation

Explore our latest software versions and extended functionality through license options as well as the current recommended high performance PC-Hardware to optimize your systems performance.

SEM Workstation

Efficient Workflows, Intuitive Navigation and Faster File Search

The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.



  • Latest SmartSEM version
  • Intuitive navigation
  • Windows 10

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Operate Your Scanning Electron Microscope More Efficiently

SmartSEM is an operating system for electron microscopes that provides access to advanced microscope settings, designed to solve even the most challenging tasks.



  • Enhanced imaging conditions
  • Additional software modules
  • More information of your images
  • Intuitive navigation

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Software Finder

Your Guide to Zen Upgrades

Your interactive guide for software news, upgrades and additional functionality. Learn more about ZEISS software, workstations and compatibility, new software functionalities and recent software releases.


  • Interactive tool to learn more about ZEN
  • Easy software upgrade guide
  • Workstation compatibility information
  • Learn more about available additional software functionality
  • Additional information about ZEN core


Software Module Catalog

Extend the Functionality and Performance of Your Microscope

Add new and improve existing functionality through our broad range of licenses which will help you to improve your processes, ease the use of your system and have tools to receive more information.



  • Improve your process by new functionality
  • More comfortable usage

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3D Surface Modelling

Topographical 3D Sample Analysis

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional software package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of the aBSD or the AsB detector.


  • 3DSM
  • Perform a 3D surface reconstruction of your sample
  • Profit from real-time operation and reconstruction times < 2s

3DSM Metrology:

  • Gain automatic measurements and documentation in compliance with ISO 25178, DIN and ASME and other standards
  • Create completely traceable metrological reports
  • Characterize surfaces and profiles including parameters such as step height, distance, nanometer scaled contour, roughness and waviness, particle and grain size

SmartSEM Touch

Explore Your Object of Interest with a Simple Swipe of Your Finger

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools..


  • Sample type select
  • Detector overlays
  • Annotate & measure

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Case Study

Vacuum & Ease of Use

Increase your convenience and facilitate your work routine e.g. reduced loading time and increased sample throughput through the Airlock or a significantly reduced noise level through ZEISS ECO Quiet Mode. Decontaminate your specimen and chamber with the Plasma Cleaner or improve image quality through the compensation of charging effect with the Flood Gun or the Charge Compensation.

Airlock Reduce Loading Time – Increase Sample Throughput

The airlock allows efficient loading of samples without breaking the existing vacuum and thus reducing the risk of contamination of the sample chamber. By using this method sample exchange time is also significantly reduced.



  • Significantly increased throughput
  • Loading of large samples
  • Ergonomic and convenient handling

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Charge Compensation

Benefit from Less Charging Effects and an In-situ Cleaning Option

The Charge Compensation system offers localized discharging of non-conductive specimens by ionization of nitrogen. High resolution combined with an additional expansion of analytical capabilities are, with the integration of a Charge Compensation system, not restricted to conductive samples only but can also be executed for all kinds of non-conductive samples.


  • Capture non-conductive specimens
  • Improve image quality
  • Increased productivity and variety

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Plasma Cleaner

Clean Your Chamber Quickly and Effectively

ZEISS offers you a fast and cost-efficient solution for specimen and chamber decontamination. A Plasma Cleaner is used to generate reactive gas-phase radicals in a plasma. The radicals migrate into the instrument chamber and chemically react with the unwanted hydrocarbons.


  • Improved image quality
  • Fast specimen decontamination
  • Safe decontamination

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Focal CC

Define Image Quality by Eliminating Charging Effects

The ZEISS Focal CC (Focal Charge Compensation) is an improved gas injection system to increase image quality by eliminating charging effects. Former specimen charging, particularly in samples containing large regions of bare resin resulted in a significant degradation in image quality and distortion.


  • High resolution imaging
  • Damage prevention
  • Automatic needle retraction

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ZEISS ECO Quiet Mode

Reduce Noise and Save Energy

By using ZEISS ECO Quiet Mode and with help from a vacuum reservoir the pre-pump is automatically switched off after reaching a factory pre-set vacuum level. The vacuum reservoir allows the system to be operated for hours without the need of the pre-pump. This results in both the reduction of noise levels and energy consumption.



  • More comfortable application
  • High definition imaging
  • Energy-saving

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Other Accessories

Upgrade your microscope with additional accessories such as sample holders, the latest version of our dual joystick controller and control panel or an Uninterruptible Power Supply (UPS) which ensures the safety of your system in case of a power failure.

Uninterruptible Power Supply

Secure Your Microscope in Case of a Power Failure and Prevent Data Loss

An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.



  • Bridge brief power failures
  • Safety for your microscope

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SEM Dual Joystick and Control Panel

Control Your SEM More Easily

With the Dual Joystick Controller and the Control Panel installed, operating becomes much more comfortable. The Dual Joystick Controller can be used for stage control and specimen navigation and the Control Panel gives you easy access to the most frequently used functions of the SEM.


  • Many compensation possibilities
  • Various configuration options
  • Convenient handling

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